From 496f3bd643e6172f928bdd608397a257f2f07bc6 Mon Sep 17 00:00:00 2001 From: wyj <157651241@qq.com> Date: Tue, 25 Jun 2024 13:23:05 +0800 Subject: [PATCH] =?UTF-8?q?=E5=B7=A5=E8=89=BA=E6=B5=81=E7=A8=8B=E4=BC=98?= =?UTF-8?q?=E5=8C=96=EF=BC=9A=E5=85=89=E6=96=91=E9=87=87=E9=9B=86=EF=BC=8C?= =?UTF-8?q?=E5=8A=9F=E7=8E=87=E5=A4=8D=E6=A3=80=EF=BC=8C=E6=B5=8B=E8=B7=9D?= =?UTF-8?q?=E8=B0=83=E7=84=A6=EF=BC=8C=E6=B0=94=E5=B8=98=E6=B0=AE=E6=B0=94?= MIME-Version: 1.0 Content-Type: text/plain; charset=UTF-8 Content-Transfer-Encoding: 8bit --- LaiPuLaser/LaiPuLaser/CommonFlowMgr.cpp | 297 ++++++++++-------------- 1 file changed, 127 insertions(+), 170 deletions(-) diff --git a/LaiPuLaser/LaiPuLaser/CommonFlowMgr.cpp b/LaiPuLaser/LaiPuLaser/CommonFlowMgr.cpp index 8788253..ba54d42 100644 --- a/LaiPuLaser/LaiPuLaser/CommonFlowMgr.cpp +++ b/LaiPuLaser/LaiPuLaser/CommonFlowMgr.cpp @@ -3475,50 +3475,13 @@ void CCommonFlowMgr::CreatAnnealPrepareCmd(CWorkCmdInvoker &CmdInvoker,CWafer * pCmd->BindingPar(pWafer);//绑定当前生产的wafer CmdInvoker.AddCmd(pCmd); } - //打开气帘 - if(m_bAirCurtain) - { - { - CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); - pCmd->SetExcuteAction(_ExcuteAction_IO_Write); - pCmd->SetIntParVal(_IO_W_Anneal_AirCurtain); - pCmd->SetBoolParVal(bOPEN); - CmdInvoker.AddCmd(pCmd); - } - } //设置后续动作的平台速度为空移速度 { CWorkCmdSetAsixSpeed *pCmd = new CWorkCmdSetAsixSpeed(); pCmd->SetAsixSpeedType(_AsixSpeedType_EmptyMoveXY); CmdInvoker.AddCmd(pCmd); - } - //测距仪测量焦距(m_bPJobFirstWafer决定当前wafer 是否需要调整焦距) - if(gDeviceStateMgr->QueryUsedFunc(_EUsedFunc_LaserDisMeter) && (pWafer->m_bNeedFoucsAdjust)) - { - //发送eap 事件 - { - CSecsEventInfo EventInfo; - EventInfo.m_EventType = _SecsEvent_Wafer_FoucsAdjust_Start; - EventInfo.m_Wafer = pWafer; - CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); - pCmd->SetExcuteAction(_ExcuteAction_SendSecsEvent); - pCmd->SetSecsEventInfo(EventInfo); - CmdInvoker.AddCmd(pCmd); - } - //创建自动校准的指令流程(完成后不回到焦距位置)(如果使用安全坐标,回到安全坐标) - CreatAutoFindFocusInvokerCmd(CmdInvoker,false); - //发送eap 事件 - { - CSecsEventInfo EventInfo; - EventInfo.m_EventType = _SecsEvent_Wafer_FoucsAdjust_End; - EventInfo.m_Wafer = pWafer; - CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); - pCmd->SetExcuteAction(_ExcuteAction_SendSecsEvent); - pCmd->SetSecsEventInfo(EventInfo); - CmdInvoker.AddCmd(pCmd); - } - } - //关闭气缸衰减器(现在XY 在测距仪位置) + } + //关闭气缸衰减器 { CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); pCmd->SetExcuteAction(_ExcuteAction_IO_AirDimmerCtrl); @@ -3629,54 +3592,6 @@ void CCommonFlowMgr::CreatSubRecipeAnnealPrepareCmd(CWorkCmdInvoker &CmdInvoker pCmd->SetExcuteAction(_ExcuteAction_CheckWarningMsg); CmdInvoker.AddCmd(pCmd); } - //自动控制N2 - { - RecipePar = Recipe.GetRecipePar(RECIPE_PAR_NAME_N2_STATE); - bool bN2Open = RecipePar.m_ParBoolVal; - if (!bN2Open) - { - //停止使用MFC检测 - { - CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); - pCmd->SetExcuteAction(_ExcuteAction_MFCUseSignal); - pCmd->SetIntParVal(0); - pCmd->SetBoolParVal(bCLOSE); - pCmd->CanNotCancel(); - CmdInvoker.AddCmd(pCmd); - } - } - { - CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); - pCmd->SetExcuteAction(_ExcuteAction_IO_Write); - pCmd->SetIntParVal(_IO_W_Anneal_N2); - pCmd->SetBoolParVal(bN2Open); - CmdInvoker.AddCmd(pCmd); - } - if (bN2Open) - { - if (gAnnealMonitoringMgr->IsUseN2Flowmeter()) - { - double CurVal = 0.0; - RecipePar = Recipe.GetRecipePar(RECIPE_PAR_NAME_USE_CUR_N2VAL); - if (RecipePar.m_ParBoolVal) - { - CRecipeParameter RecipePar2 = Recipe.GetRecipePar(RECIPE_PAR_NAME_N2_VAL); - CurVal = RecipePar2.m_ParDoubleVal; - } - else - { - CurVal = gAnnealMonitoringMgr->GetCurMFCVal(); - } - //设置N2流量 - { - CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); - pCmd->SetExcuteAction(_ExcuteAction_SetN2Val); - pCmd->SetDoubleParVal(CurVal); - CmdInvoker.AddCmd(pCmd); - } - } - } - } //检查LDD 状态 if(gDeviceStateMgr->QueryUsedFunc(_EUsedFunc_LaserDeviceCtrl)) { @@ -3730,6 +3645,46 @@ void CCommonFlowMgr::CreatSubRecipeAnnealPrepareCmd(CWorkCmdInvoker &CmdInvoker gLogMgr->WriteLogInfo(LogInfo); } { + if (bCreatRecipeEdiCheckCmd)//创建cmd 不一定会执行 + { + //Edi 复检开始工作(检查是否需要复检) + { + //功率密度复检参数是否发生变化 + CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); + pCmd->SetExcuteAction(_ExcuteAction_EdiCheckStart); + pCmd->SetBoolParVal(bRcpEdiParChange); + pCmd->SetBoolParVal2(pWafer->m_bNeedEdiCheck);//是否需要复检 + CmdInvoker.AddCmd(pCmd); + } + //抓取光斑数据(Laser1和Laser2合并抓取一次) + //需要复检的时候才抓取光斑参数 + if (!m_bIsManusal_Anneal_Test + &&gAnnealMonitoringMgr->IsbBeamCheckOnJobStart() + && gDeviceStateMgr->QueryUsedFunc(_EUsedFunc_LaserBeamMeter)) + { + //发送eap 事件 + { + CSecsEventInfo EventInfo; + EventInfo.m_EventType = _SecsEvent_Beam_Check_Start; + EventInfo.m_Wafer = pWafer; + CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); + pCmd->SetExcuteAction(_ExcuteAction_SendSecsEvent); + pCmd->SetSecsEventInfo(EventInfo); + CmdInvoker.AddCmd(pCmd); + } + CreatLaserBeamFlowCmd(CmdInvoker, pWafer, true); + //发送eap 事件 + { + CSecsEventInfo EventInfo; + EventInfo.m_EventType = _SecsEvent_Beam_Check_End; + EventInfo.m_Wafer = pWafer; + CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); + pCmd->SetExcuteAction(_ExcuteAction_SendSecsEvent); + pCmd->SetSecsEventInfo(EventInfo); + CmdInvoker.AddCmd(pCmd); + } + } + } //设置SubRecipe 的激光参数(频率电流和延时) //Rcp 电流是0的时候也需要把电流设置为0 //参数不变的时候这个步骤不会消耗时间 @@ -3887,89 +3842,6 @@ void CCommonFlowMgr::CreatSubRecipeAnnealPrepareCmd(CWorkCmdInvoker &CmdInvoker //这个时候的激光参数已经设置为recipe 的参数 if(bCreatRecipeEdiCheckCmd)//创建cmd 不一定会执行 { - //Edi 复检开始工作(检查是否需要复检) - { - //功率密度复检参数是否发生变化 - CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); - pCmd->SetExcuteAction(_ExcuteAction_EdiCheckStart); - pCmd->SetBoolParVal(bRcpEdiParChange); - pCmd->SetBoolParVal2(pWafer->m_bNeedEdiCheck);//是否需要复检 - CmdInvoker.AddCmd(pCmd); - } - //抓取光斑数据(Laser1和Laser2合并抓取一次) - //需要复检的时候才抓取光斑参数 - if (!m_bIsManusal_Anneal_Test&&gAnnealMonitoringMgr->IsbBeamCheckOnJobStart() && gDeviceStateMgr->QueryUsedFunc(_EUsedFunc_LaserBeamMeter)) - { - //发送eap 事件 - { - CSecsEventInfo EventInfo; - EventInfo.m_EventType = _SecsEvent_Beam_Check_Start; - EventInfo.m_Wafer = pWafer; - CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); - pCmd->SetExcuteAction(_ExcuteAction_SendSecsEvent); - pCmd->SetSecsEventInfo(EventInfo); - CmdInvoker.AddCmd(pCmd); - } - CreatLaserBeamFlowCmd(CmdInvoker, pWafer, true); - //发送eap 事件 - { - CSecsEventInfo EventInfo; - EventInfo.m_EventType = _SecsEvent_Beam_Check_End; - EventInfo.m_Wafer = pWafer; - CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); - pCmd->SetExcuteAction(_ExcuteAction_SendSecsEvent); - pCmd->SetSecsEventInfo(EventInfo); - CmdInvoker.AddCmd(pCmd); - } - } -#if 0 - //这里角度调整 _ExcuteAction_EdiCheckStart 后自适应，后面脉宽复检前等待自适应结束提升效率 - if (gDeviceStateMgr->QueryUsedFunc(_EUsedFunc_TekOscilloscope)) - { - CExcuteActionPar ActionPar; - ActionPar.m_ExcuteAction = _ExcuteAction_AdjustOsiiMaxAmplitude; - ActionPar.m_DoubleParVal = lfPluseWidth;//工艺时需要赋值需要的脉宽用于判断自适应成功 - if (!bLaser2EdiZero && !bLaser1EdiZero) - { - ActionPar.m_DoubleParVal2 = 0;//工艺时需要赋值需要的脉宽用于判断自适应成功 - } - else if (!bLaser1EdiZero) - { - ActionPar.m_DoubleParVal2 = lfLaser1PluseWidthOffset;//工艺时需要赋值需要的脉宽用于判断自适应成功 - } - else if (!bLaser2EdiZero) - { - ActionPar.m_DoubleParVal2 = lfLaser2PluseWidthOffset;//工艺时需要赋值需要的脉宽用于判断自适应成功 - } - - CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); - pCmd->SetExcuteActionPar(ActionPar); - pCmd->SetbEdiCheckCmd(true);//标记为edi check cmd - CmdInvoker.AddCmd(pCmd); - } - //把双光路复检LD转45度的cmd放到_ExcuteAction_EdiCheckStart 之后 - //如果要进行edi check 并且使用两路激光的情况，先把衰减器2 的角度转到45 - if((!bLaser2EdiZero && !bLaser1EdiZero)&&bCreatRecipeEdiCheckCmd) - { - double RotatoDimmer2Ang = POW_ZERO_DIMMER_ANG_45; - //log - { - Log.Format("->RotatoDimmer2Ang = %lf",RotatoDimmer2Ang); - LogInfo.m_LogMsg = Log; - gLogMgr->WriteLogInfo(LogInfo); - } - { - CExcuteActionPar ActionPar; - ActionPar.m_ExcuteAction = _ExcuteAction_RotatoDimmer_ToAngle; - ActionPar.m_DoubleParVal = RotatoDimmer2Ang; - ActionPar.m_IntParVal = (int)_LaserDeviceType_MainLaser2; - CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); - pCmd->SetExcuteActionPar(ActionPar); - pCmd->SetbEdiCheckCmd(true);//标记为edi check cmd 不复检的时候就不执行 - CmdInvoker.AddCmd(pCmd); - } - } -#endif //XY移动到功率计位置 { CWorkCmdAsixXYMove *pCmd = new CWorkCmdAsixXYMove(); @@ -4214,6 +4086,32 @@ void CCommonFlowMgr::CreatSubRecipeAnnealPrepareCmd(CWorkCmdInvoker &CmdInvoker CmdInvoker.AddCmd(pCmd); } } + //测距仪测量焦距(m_bPJobFirstWafer决定当前wafer 是否需要调整焦距) + if (gDeviceStateMgr->QueryUsedFunc(_EUsedFunc_LaserDisMeter) && (pWafer->m_bNeedFoucsAdjust)) + { + //发送eap 事件 + { + CSecsEventInfo EventInfo; + EventInfo.m_EventType = _SecsEvent_Wafer_FoucsAdjust_Start; + EventInfo.m_Wafer = pWafer; + CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); + pCmd->SetExcuteAction(_ExcuteAction_SendSecsEvent); + pCmd->SetSecsEventInfo(EventInfo); + CmdInvoker.AddCmd(pCmd); + } + //创建自动校准的指令流程(完成后不回到焦距位置)(如果使用安全坐标,回到安全坐标) + CreatAutoFindFocusInvokerCmd(CmdInvoker, false); + //发送eap 事件 + { + CSecsEventInfo EventInfo; + EventInfo.m_EventType = _SecsEvent_Wafer_FoucsAdjust_End; + EventInfo.m_Wafer = pWafer; + CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); + pCmd->SetExcuteAction(_ExcuteAction_SendSecsEvent); + pCmd->SetSecsEventInfo(EventInfo); + CmdInvoker.AddCmd(pCmd); + } + } //Z 轴到激光焦点位置(加上sub recipe 的焦距调整值) //cmd执行时再去获取当前的激光焦距坐标 { @@ -4225,6 +4123,65 @@ void CCommonFlowMgr::CreatSubRecipeAnnealPrepareCmd(CWorkCmdInvoker &CmdInvoker pCmd->SetbMoveToLaserFoucsZ(true,FoucsZAdjustVal); CmdInvoker.AddCmd(pCmd); } + //打开气帘 + if (m_bAirCurtain) + { + { + CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); + pCmd->SetExcuteAction(_ExcuteAction_IO_Write); + pCmd->SetIntParVal(_IO_W_Anneal_AirCurtain); + pCmd->SetBoolParVal(bOPEN); + CmdInvoker.AddCmd(pCmd); + } + } + //自动控制N2 + { + RecipePar = Recipe.GetRecipePar(RECIPE_PAR_NAME_N2_STATE); + bool bN2Open = RecipePar.m_ParBoolVal; + if (!bN2Open) + { + //停止使用MFC检测 + { + CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); + pCmd->SetExcuteAction(_ExcuteAction_MFCUseSignal); + pCmd->SetIntParVal(0); + pCmd->SetBoolParVal(bCLOSE); + pCmd->CanNotCancel(); + CmdInvoker.AddCmd(pCmd); + } + } + { + CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); + pCmd->SetExcuteAction(_ExcuteAction_IO_Write); + pCmd->SetIntParVal(_IO_W_Anneal_N2); + pCmd->SetBoolParVal(bN2Open); + CmdInvoker.AddCmd(pCmd); + } + if (bN2Open) + { + if (gAnnealMonitoringMgr->IsUseN2Flowmeter()) + { + double CurVal = 0.0; + RecipePar = Recipe.GetRecipePar(RECIPE_PAR_NAME_USE_CUR_N2VAL); + if (RecipePar.m_ParBoolVal) + { + CRecipeParameter RecipePar2 = Recipe.GetRecipePar(RECIPE_PAR_NAME_N2_VAL); + CurVal = RecipePar2.m_ParDoubleVal; + } + else + { + CurVal = gAnnealMonitoringMgr->GetCurMFCVal(); + } + //设置N2流量 + { + CWorkCmdExcuteAction *pCmd = new CWorkCmdExcuteAction(); + pCmd->SetExcuteAction(_ExcuteAction_SetN2Val); + pCmd->SetDoubleParVal(CurVal); + CmdInvoker.AddCmd(pCmd); + } + } + } + } //加工前立即检测一次光路功率 if (!m_bSubRecipeEdiEqualZero) {