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红色软件Recipe详细参数介绍

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wklyj 6 months ago
parent 8aa2d662e9
commit e1781eca52
8 changed files with 74 additions and 0 deletions
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1
.gitignore vendored
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@ -12,3 +12,4 @@
/LaipuDrawing/hlp/LaiPuLaser.chm
/LaiPuLaser/LaiPuLaser/Debug
/LaiPuLaser/Debug
*.ipch

24
LaipuDrawing/DlgChildRecipe.cpp
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@ -67,6 +67,7 @@ BEGIN_MESSAGE_MAP(CDlgChildRecipe, CMyDlgView)
ON_BN_CLICKED(IDC_RCP_HISTORY_BTN, &CDlgChildRecipe::OnBnClickedRcpHistoryBtn)
ON_BN_CLICKED(IDC_RCP_OFFSET_TAB, &CDlgChildRecipe::OnBnClickedRcpOffsetTab)
ON_BN_CLICKED(NEW_UPDATE_RECIPE_BTN, &CDlgChildRecipe::OnBnClickedUpdateRecipeBtn)
ON_NOTIFY(NM_CLICK, NEW_EDIT_RECIPE_INFO_LIST, &CDlgChildRecipe::OnNMClickEditRecipeInfoList)
END_MESSAGE_MAP()
@ -575,6 +576,11 @@ void CDlgChildRecipe::OnNMClickEditRecipeList(NMHDR *pNMHDR, LRESULT *pResult)
}
}
}
//响应参数详细信息
{
CString Str = gRecipeMgr->GetShowParText(Row);
GetDlgItem(IDC_ShowSubRcpInfo)->SetWindowText(Str);
}
}
}
//Edit 离焦的时候更新为list 的值
@ -701,3 +707,21 @@ void CDlgChildRecipe::OnBnClickedUpdateRecipeBtn()
OnCbnSelchangeNewRecipeGroupCombo();
}
}
void CDlgChildRecipe::OnNMClickEditRecipeInfoList(NMHDR *pNMHDR, LRESULT *pResult)
{
LPNMITEMACTIVATE pNMItemActivate = reinterpret_cast<LPNMITEMACTIVATE>(pNMHDR);
// TODO: 在此添加控件通知处理程序代码
*pResult = 0;
NM_LISTVIEW* pNMListView = (NM_LISTVIEW*)pNMHDR;
int Row = pNMListView->iItem;
if (Row >= 0)//行号
{
//响应参数详细信息
{
CString Str = gRecipeMgr->GetShowParText(Rcp_CalInfo_Start_Idx + Row);
GetDlgItem(IDC_ShowSubRcpInfo)->SetWindowText(Str);
}
}
}

1
LaipuDrawing/DlgChildRecipe.h
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@ -99,4 +99,5 @@ public:
afx_msg void OnBnClickedRcpHistoryBtn();
afx_msg void OnBnClickedRcpOffsetTab();
afx_msg void OnBnClickedUpdateRecipeBtn();
afx_msg void OnNMClickEditRecipeInfoList(NMHDR *pNMHDR, LRESULT *pResult);
};

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LaipuDrawing/LaiPuLaser.aps
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LaipuDrawing/LaiPuLaser.rc
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44
LaipuDrawing/RecipeMgr.cpp
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@ -89,6 +89,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 1000;//默认值
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_LASER_FRE);
RecipePar.m_DetailInfo = "激光1频率：一秒内激光脉冲个数";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -100,6 +101,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 1000;//默认值
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_LASER_FRE);
RecipePar.m_DetailInfo = "激光2频率：一秒内激光脉冲个数";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -111,6 +113,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 0;
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_LASER_PULSE_DELAY);
RecipePar.m_DetailInfo = "双脉冲延时：激光器脉冲延时时间";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -122,6 +125,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 0;
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_LASER_CURR_1);
RecipePar.m_DetailInfo = "Laser1电流值:工艺设置电流值";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -133,6 +137,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 0;
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_LASER_CURR_2);
RecipePar.m_DetailInfo = "Laser2电流值:工艺设置电流值";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -144,6 +149,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 0;
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_LASER_EDI_1);
RecipePar.m_DetailInfo = "Laser1目标功率密度 ：最终的edi还要加上Laser Edi Offset和补偿表中的Laser Edi Offset值";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -155,6 +161,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 0;
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_LASER_EDI_2);
RecipePar.m_DetailInfo = "Laser2目标功率密度 ：最终的edi还要加上Laser Edi Offset和补偿表中的Laser Edi Offset值";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -166,6 +173,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 0;
RecipePar.m_DoubleMinVal = -2;
RecipePar.m_DoubleMaxVal = 2;
RecipePar.m_DetailInfo = "Laser1目标功率密度补偿";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -177,6 +185,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 0;
RecipePar.m_DoubleMinVal = -2;
RecipePar.m_DoubleMaxVal = 2;
RecipePar.m_DetailInfo = "Laser2目标功率密度补偿";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -188,6 +197,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 0;
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = 5;
RecipePar.m_DetailInfo = "功率密度复检卡控范围：等于0表示不进行复检，大于表示要进行复检且复检调整后的功率密度在这个误差范围之内";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -199,6 +209,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 0;
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = 99;
RecipePar.m_DetailInfo = "X方向光斑重叠率：会影响X方向扫描速度的计算值";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -210,6 +221,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 0;
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = 99;
RecipePar.m_DetailInfo = "Y方向光斑重叠率：会影响Y方向移动间隔";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -221,6 +233,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 0;
RecipePar.m_DoubleMinVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MIN_FOCUS_ADJUST);
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_FOCUS_ADJUST);
RecipePar.m_DetailInfo = "Z轴焦距微调值：用于工艺前Z轴在目前设置的激光焦距点上下进行微调";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -232,6 +245,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 0;
RecipePar.m_DoubleMinVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MIN_SCAN_SPEED);
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_SCAN_SPEED);
RecipePar.m_DetailInfo = "固定扫描速度：等于0时无效，大于0时X方向光斑重叠率无效，工艺过程中将使用这个速度值作为X方向的扫描速度";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -243,6 +257,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 0;
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_FIX_SCAN_LINE_GAP);
RecipePar.m_DetailInfo = "固定扫描间隔：等于0时无效，大于0时Y方向光斑重叠率无效，工艺过程中将使用这个值作为Y方向的扫描移动间隔";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -254,6 +269,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 0;
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = 100000;
RecipePar.m_DetailInfo = "扫描线的起始索引值：表示从第几根线开始扫描，用于补打wafer";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -265,6 +281,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = 270;
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = 360;
RecipePar.m_DetailInfo = "wafer准直角度：用于控制wafer放到stage上的notch方向，多subrcp的情况第一个sub的值为有效值";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -284,6 +301,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParDoubleVal = m_MinVal;
RecipePar.m_DoubleMinVal = m_MinVal;
RecipePar.m_DoubleMaxVal = m_MaxVal;
RecipePar.m_DetailInfo = "MFC流量控制值：MFC控制N2流量值";
m_RecipeParVec.push_back(RecipePar);
}
//下拉框参数------------------------------------------------
@ -292,6 +310,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParName = RECIPE_PAR_NAME_SCAN_AREA;
RecipePar.m_ParShowName = "Scan Area";
RecipePar.m_ParType = _RecipeParType_CString;//参数的类型
RecipePar.m_DetailInfo = "扫描区域文件名称：用于指定扫描区域的图形文件，确定扫描的范围";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -300,6 +319,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParShowName = "Area Idx";
RecipePar.m_ParType = _RecipeParType_Int;//参数的类型
RecipePar.m_ParIntVal = 1;
RecipePar.m_DetailInfo = "扫描区域编号：扫描区域文件中包含多个扫描区域时，每个sub rcp只能选择一个区域编号进行工艺";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -308,6 +328,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParShowName = "N2";
RecipePar.m_ParType = _RecipeParType_Bool;//参数的类型
RecipePar.m_ParBoolVal = true;
RecipePar.m_DetailInfo = "N2开关控制，退火过程中是否自动打开N2";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -316,6 +337,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParShowName = "Use CurN2Val";
RecipePar.m_ParType = _RecipeParType_Bool;//参数的类型
RecipePar.m_ParBoolVal = false;
RecipePar.m_DetailInfo = "MFC控制开关：是否使用recipe的MFC流量控制值";
m_RecipeParVec.push_back(RecipePar);
}
#ifdef __OFFSET_TABLE__
@ -325,6 +347,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParShowName = "Offset Table";
RecipePar.m_ParType = _RecipeParType_CString;//参数的类型
RecipePar.m_ParStrVal = RECIPE_OFFSET_TBL_NULL;
RecipePar.m_DetailInfo = "补偿表的名称：用于link指定的补偿表，可以补偿edi和激光电流值";
m_RecipeParVec.push_back(RecipePar);
}
#endif
@ -335,6 +358,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_ParShowName = "Run Times";
RecipePar.m_ParType = _RecipeParType_Int;//参数的类型
RecipePar.m_ParIntVal = 1;//默认值
RecipePar.m_DetailInfo = "工艺运行次数：正常设置为1，大于1时表示跑cycle，多subrcp的情况第一个sub的值为有效值";
m_RecipeParVec.push_back(RecipePar);
}
@ -350,6 +374,8 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_LASER_POW_1);
RecipePar.m_bRcpInfoPar = true;//是否为计算参数(不能被编辑)
//RecipePar.m_DetailInfo = "Laser1功率值：1.Laser固定电流为0时，根据edi自动计算 2.Laser固定电流大于0时，在功率点检表中查找对应的功率值，用于计算衰减角度";
RecipePar.m_DetailInfo = "Laser1功率值：在功率点检表中查找对应的功率值，用于计算衰减角度";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -362,6 +388,8 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_LASER_POW_2);
RecipePar.m_bRcpInfoPar = true;//是否为计算参数(不能被编辑)
//RecipePar.m_DetailInfo = "Laser2功率值：1.Laser固定电流为0时，根据edi自动计算 2.Laser固定电流大于0时，在功率点检表中查找对应的功率值，用于计算衰减角度";
RecipePar.m_DetailInfo = "Laser2功率值：在功率点检表中查找对应的功率值，用于计算衰减角度";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -374,6 +402,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_DoubleMinVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MIN_SCAN_SPEED);
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_SCAN_SPEED);
RecipePar.m_bRcpInfoPar = true;//是否为计算参数(不能被编辑)
RecipePar.m_DetailInfo = "X方向扫描速度：固定扫描速度等于0时，由X方向重叠率计算得出，固定扫描速度大于0时，等于固定扫描速度";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -386,6 +415,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_DIMMER_ANG_1);
RecipePar.m_bRcpInfoPar = true;//是否为计算参数(不能被编辑)
RecipePar.m_DetailInfo = "Laser1衰减角度：由edi，频率，功率计算得出的衰减器角度，固定电流值大于0才会生效";
m_RecipeParVec.push_back(RecipePar);
}
{
@ -398,6 +428,7 @@ void CSubRecipe::IntiRecipeParVec()
RecipePar.m_DoubleMinVal = 0;
RecipePar.m_DoubleMaxVal = gCommonParaMgr->GetCommonParaVal(RECIPE_PAR_MAX_DIMMER_ANG_2);
RecipePar.m_bRcpInfoPar = true;//是否为计算参数(不能被编辑)
RecipePar.m_DetailInfo = "Laser2衰减角度：由edi，频率，功率计算得出的衰减器角度，固定电流值大于0才会生效";
m_RecipeParVec.push_back(RecipePar);
}
#endif
@ -2467,4 +2498,17 @@ CString CRecipeMgr::GetOffsetTablePath(CString TabName)
}
#endif
CString CRecipeMgr::GetShowParText(int Row)
{
CString str = "";
vector<CSubRecipe> &SubRecipeVec = m_CurEditRecipe.GetSubRecipeVec();
int size = SubRecipeVec.size();
if (size <= 0)
{
str = "无有效Recipe";
}
str = SubRecipeVec[0].m_RecipeParVec[Row].m_DetailInfo;
return str;
}
#endif

4
LaipuDrawing/RecipeMgr.h
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@ -68,6 +68,7 @@ public:
m_ListItemWidht = 100;//列表宽度
m_bRcpInfoPar = false;//是否为计算参数(不能被编辑)
m_ParUnit = "/";//参数的单位,用于显示
m_DetailInfo = "未定义";
};
CString GetParStr();
void SetValByStr(CString s);
@ -90,6 +91,8 @@ public:
bool m_bRcpInfoPar;//是否为计算参数(不能被编辑)
CString m_ParUnit;//参数的单位,用于显示
CString m_DetailInfo;//详细参数信息
};
class CRecipeCtrlItem
@ -267,6 +270,7 @@ public:
void UpdateLaserFocusProp();
void UpdateRecipeGroupInfo();
CString GetOffsetTablePath(CString TabName);
CString GetShowParText(int Row);
private:
CString GetGroupDirPath(int GroupIdx);
CString GetRecipeNameListPath();

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