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468 lines
20 KiB
C++
468 lines
20 KiB
C++
#pragma once
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#include "module.h"
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#include "SecsEquip.h" //金南瓜头文件
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#include "SecsEquip300.h"
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#include "RecipeMgr.h"
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#include "TransferArmMgr.h"
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//发送给服务器的事件
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enum eSecsEquipEvent
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{
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_SecsEvent_Null = 0,
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_SecsEvent_PorcessStateChanged,//过程状态变化
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_SecsEvent_Port1StatusChanged,//Port1 状态变化
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_SecsEvent_Port2StatusChanged,//Port2 状态变化
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_SecsEvent_FoupLoadMap_Start,
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_SecsEvent_FoupLoadMap_End,
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_SecsEvent_FoupUnload_Start,
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_SecsEvent_FoupUnload_End,
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_SecsEvent_LaserWarmup_Start,
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_SecsEvent_LaserWarmup_End,
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_SecsEvent_Wafer_FoupToArm1_Start,
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_SecsEvent_Wafer_FoupToArm1_End,
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_SecsEvent_Wafer_Arm1ToAligner_Start,
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_SecsEvent_Wafer_Arm1ToAligner_End,
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_SecsEvent_Wafer_Aligner_Start,
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_SecsEvent_Wafer_Aligner_End,
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_SecsEvent_Wafer_AlignerToArm2_Start,
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_SecsEvent_Wafer_AlignerToArm2_End,
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_SecsEvent_Wafer_Arm2ToAligner_Start,
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_SecsEvent_Wafer_Arm2ToAligner_End,
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_SecsEvent_Wafer_Arm2ToStage_Start,
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_SecsEvent_Wafer_Arm2ToStage_End,
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_SecsEvent_Wafer_StageToArm1_Start,
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_SecsEvent_Wafer_StageToArm1_End,
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_SecsEvent_Wafer_StageToArm2_Start,
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_SecsEvent_Wafer_StageToArm2_End,
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_SecsEvent_Wafer_AlignerToArm1_Start,
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_SecsEvent_Wafer_AlignerToArm1_End,
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_SecsEvent_Wafer_Arm1ToFoup_Start,
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_SecsEvent_Wafer_Arm1ToFoup_End,
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_SecsEvent_Wafer_Process_Start,
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_SecsEvent_Wafer_Process_End,
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_SecsEvent_Wafer_FoucsAdjust_Start,
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_SecsEvent_Wafer_FoucsAdjust_End,
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_SecsEvent_Wafer_EdiCheck_Start,
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_SecsEvent_Wafer_EdiCheck_End,
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_SecsEvent_Wafer_Anneal_Start,
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_SecsEvent_Wafer_Anneal_End,
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_SecsEvent_Beam_Check_Start,
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_SecsEvent_Beam_Check_End,
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_SecsEvent_Max,
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};
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//设备流程状态
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enum ESecsProcessState
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{
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_ProcessState_INIT = 0,//初始化中
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_ProcessState_IDLE,//待机状态
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_ProcessState_IDLE_WITH_ALARMS,//待机(有报警)
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//_ProcessState_READY,//准备完成(收到PP-SELECT 后,然后等待MAP-CASSETTE和START)
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_ProcessState_SETTING_UP,//加工前准备(job start 之后load 之前的状态,设置激光参数...)
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_ProcessState_LOAD,//上料
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_ProcessState_PROCESSING,//加工中
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_ProcessState_UNLOAD,//退料
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_ProcessState_PAUSED,//已暂停
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_ProcessState_ALARM_PAUSED,//已暂停，并且有报警
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_ProcessState_Null,//未定义
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};
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//port 的状态
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enum ESecsPortState
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{
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_PortState_NoCassette = 0,//没有检测到料盒
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_PortState_Cassette,//料盒放上去
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_PortState_Idle,//等待指令(可以接收PP-SELECT 指令)
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_PortState_Mapping,//mapping
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_PortState_MappingComplete,//mapping 完成
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_PortState_Ready,//job 创建完成(waiting 状态),等待加工
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_PortState_Processing,//加工中
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_PortState_Paused,//暂停
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_PortState_Stop,//结束
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_PortState_Null,//未定义
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};
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//和服务器通信用的参数
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class CSecsCommPar
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{
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public:
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CSecsCommPar(void);
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public:
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CString m_SocketAddress;//Socket IP地址(服务器地址,被动模式不用设置)
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int m_SocketPort;//Socket 端口号
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bool m_bPassiveMode;//被动模式
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CString m_EquipMDLN;//设备号(用来给host 识别用)
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int m_Timeout1;//通信超时1
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int m_Timeout2;//通信超时2
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int m_Timeout3;//通信超时3
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int m_Timeout4;//通信超时4
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int m_Timeout5;//通信超时5
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int m_Timeout6;//通信超时6
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int m_Timeout7;//通信超时7
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};
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//RMS数据
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class CPPFormatData
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{
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public:
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CPPFormatData(void)
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{
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};
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public:
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CRecipe m_GetRecipe;//Eap 获取的recipe F7F25
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CRecipe m_SetRecipe;//Eap 设置的recipe F7F23
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set<int> m_RecipePPCodeSet;//记录当前设置过的PPCode
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};
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enum eOpPPFormatType
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{
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_OpPPFormatType_PreparePP_F7F25 = 0,//准备F7F25临时recipe
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_OpPPFormatType_GetPPVal_F7F25,//获取F7F25 recipe 参数值
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_OpPPFormatType_PreparePP_F7F23,//准备F7F23临时recipe
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_OpPPFormatType_SetPPVal_F7F23,//设置F7F23 recipe 参数值
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_OpPPFormatType_SetPPComplete_F7F23,//设置F7F23 recipe 完成
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};
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class COperatePPFormatDataPar
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{
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public:
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COperatePPFormatDataPar(void)
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{
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m_nAck = ePPSuccess;
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};
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public:
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eOpPPFormatType m_OpPPFormatType;
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int m_PPCode;
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vector<string> m_PPFormatVal;
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PP_HANDLE_REPLY m_nAck;
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CPPFormatData m_PPFormatData;
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};
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class CWafer;
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//发送SecsEvent 的附带数据
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class CSecsEventInfo
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{
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public:
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CSecsEventInfo()
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{
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m_Wafer = NULL;
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};
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public:
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eSecsEquipEvent m_EventType;
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eWaferLoadPortType m_LoadPortType;
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CWafer *m_Wafer;
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};
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//fdc保持参数(最近一次的值)
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class CFDCKeepPar
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{
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public:
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CFDCKeepPar()
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{
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m_BeamPar_Beam_Centroid_X = 0;
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m_BeamPar_Beam_Centroid_Y = 0;
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m_BeamPar_Dt_X = 0;
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m_BeamPar_Dt_Y = 0;
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m_BeamPar_Smoothing_factor_X = 0;
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m_BeamPar_Smoothing_factor_Y = 0;
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m_BeamPar_Uniformity_X = 0;
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m_BeamPar_Uniformity_Y = 0;
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m_BeamPar_Top_Uniformity_X = 0;
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m_BeamPar_Top_Uniformity_Y = 0;
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m_BeamPar_Edge_Gradient_X = 0;
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m_BeamPar_Edge_Gradient_Y = 0;
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m_DistanceVal = 0;//测距仪读数
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m_StageLaser1Powermeter = 0;//平台功率计读数
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m_StageLaser2Powermeter = 0;
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m_StageLaser1Edi = 0;//复检时Edi 值
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m_StageLaser2Edi = 0;//复检时Edi 值
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//Ymtc Box Beam 计算参数
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m_Beam_Check_alpha = 0;
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m_Beam_Check_size_X = 0;
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m_Beam_Check_size_Y = 0;
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m_Beam_Check_centroid_X = 0;
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m_Beam_Check_centroid_Y = 0;
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m_Beam_Check_center_of_mass_X = 0;
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m_Beam_Check_center_of_mass_Y = 0;
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m_Beam_Check_unf_std_X = 0;
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m_Beam_Check_unf_std_div_avg_X = 0;
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m_Beam_Check_unf_etp_X = 0;
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m_Beam_Check_unf_std_Y = 0;
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m_Beam_Check_unf_std_div_avg_Y = 0;
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m_Beam_Check_unf_etp_Y = 0;
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m_Beam_Check_unf_std = 0;
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m_Beam_Check_unf_std_div_avg = 0;
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m_Beam_Check_unf_etp = 0;
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m_Beam_Check_slope_left = 0;
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m_Beam_Check_slope_right = 0;
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m_Beam_Check_slope_up = 0;
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m_Beam_Check_slope_down = 0;
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m_Beam_Check_region1 = 0;
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m_Beam_Check_region2 = 0;
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m_Beam_Check_region3 = 0;
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m_Beam_Check_region4 = 0;
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m_Beam_Check_region5 = 0;
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m_Beam_Check_Dt_X_954 = 0;
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m_Beam_Check_Dt_Y_954 = 0;
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m_Beam_Check_Clamp_limit = 0;
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m_Beam_Check_Dt_X_865 = 0;
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m_Beam_Check_Dt_X_865_Std = 0;
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m_Beam_Check_Dt_X_865_Min = 0;
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m_Beam_Check_Dt_X_865_Count = 0;
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m_Beam_Check_Dt_Y_865 = 0;
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m_Beam_Check_Dt_Y_865_Std = 0;
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m_Beam_Check_Dt_Y_865_Min = 0;
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m_Beam_Check_Dt_Y_865_Count = 0;
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m_Edi_Check_Adjust_Times = 0;//功率密度复检的调整次数
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m_Path_Power_Data_Cnt = 0;//path功率计数据点数
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m_Path_Power_AMplitudeZCnt = 0;//path功率计正向波动点数
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m_Path_Power_AMplitudeFCnt = 0;//path功率计负向波动点数
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m_Path_Power_AMplitudeZAvg = 0;//path功率计正向波动平均值w
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m_Path_Power_AMplitudeFAvg = 0;//path功率计正向波动平均值w
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};
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public:
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//Beamgage软件采集数据
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double m_BeamPar_Beam_Centroid_X;
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double m_BeamPar_Beam_Centroid_Y;
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double m_BeamPar_Dt_X;
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double m_BeamPar_Dt_Y;
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double m_BeamPar_Smoothing_factor_X;
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double m_BeamPar_Smoothing_factor_Y;
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double m_BeamPar_Uniformity_X;
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double m_BeamPar_Uniformity_Y;
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double m_BeamPar_Top_Uniformity_X;
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double m_BeamPar_Top_Uniformity_Y;
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double m_BeamPar_Edge_Gradient_X;
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double m_BeamPar_Edge_Gradient_Y;
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//测距仪读数
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double m_DistanceVal;
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//stage 功率计读数
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double m_StageLaser1Powermeter;//Laser1 平台功率计读数
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double m_StageLaser2Powermeter;//Laser1 平台功率计读数
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double m_StageLaser1Edi;//复检时Edi 值
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double m_StageLaser2Edi;//复检时Edi 值
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double m_Edi_Check_Adjust_Times;//功率密度复检的调整次数
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//path功率计
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double m_Path_Power_Data_Cnt;//path功率计数据点数
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double m_Path_Power_AMplitudeZCnt;//path功率计正向波动点数
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double m_Path_Power_AMplitudeFCnt;//path功率计负向波动点数
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double m_Path_Power_AMplitudeZAvg;//path功率计正向波动平均值w
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double m_Path_Power_AMplitudeFAvg;//path功率计正向波动平均值w
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//Ymtc Box Beam 计算参数(BeamResultPara.bin中的数量和顺序要一致)
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CString m_Beam_Check_Lotid;
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CString m_Beam_Check_Waferid;
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double m_Beam_Check_alpha;
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double m_Beam_Check_size_X;
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double m_Beam_Check_size_Y;
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double m_Beam_Check_centroid_X;
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double m_Beam_Check_centroid_Y;
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double m_Beam_Check_center_of_mass_X;
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double m_Beam_Check_center_of_mass_Y;
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double m_Beam_Check_unf_std_X;
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double m_Beam_Check_unf_std_div_avg_X;
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double m_Beam_Check_unf_etp_X;
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double m_Beam_Check_unf_std_Y;
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double m_Beam_Check_unf_std_div_avg_Y;
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double m_Beam_Check_unf_etp_Y;
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double m_Beam_Check_unf_std;
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double m_Beam_Check_unf_std_div_avg;
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double m_Beam_Check_unf_etp;
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double m_Beam_Check_slope_left;
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double m_Beam_Check_slope_right;
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double m_Beam_Check_slope_up;
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double m_Beam_Check_slope_down;
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double m_Beam_Check_region1;
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double m_Beam_Check_region2;
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double m_Beam_Check_region3;
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double m_Beam_Check_region4;
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double m_Beam_Check_region5;
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double m_Beam_Check_Dt_X_954;
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double m_Beam_Check_Dt_Y_954;
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double m_Beam_Check_Clamp_limit;
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double m_Beam_Check_Dt_X_865;
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double m_Beam_Check_Dt_X_865_Std;
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double m_Beam_Check_Dt_X_865_Min;
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double m_Beam_Check_Dt_X_865_Count;
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double m_Beam_Check_Dt_Y_865;
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double m_Beam_Check_Dt_Y_865_Std;
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double m_Beam_Check_Dt_Y_865_Min;
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double m_Beam_Check_Dt_Y_865_Count;
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};
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//半导体SEMI 通信协议管理
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class CSemiSecsCommMgr :public CModule
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{
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public:
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CSemiSecsCommMgr(void);
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~CSemiSecsCommMgr(void);
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virtual CMFCPropertyGridProperty *CreatGridProperty();
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virtual void OnPropertyChanged();
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virtual CString GetParDirName(){return "SemiSecs";};
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virtual MODULE GetModuleType(){return _SEMI_SECS_PORP;};
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virtual void OnAppInitialize();//软件打开时
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virtual void OnExitApp();//退出软件时
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void SetAlarmState(int AlarmID,bool bOn);
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CString GetCurCommStateStr();
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CString GetCurCtrlStateStr();
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void OnCommStateChange(COMM_STATE State);
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bool IsHostCommunicationSuc();
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void OnCtrlStateChange(CONTROL_STATE State);
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void ChangeCtrlMode(CONTROL_MODE CtrlMode);
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const char* OnSecsGetVidVarValue(int varID);
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const char* OnSecsGetECVidVarValue(int varID);
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REMOTE_REPLY OnRemoteCmd(REMOTE_DATA rd);
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ESecsProcessState GetCurProcessState(){return m_CurProcessState;};
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void OnPPSelect(eWaferLoadPortType PortType);
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void OnCancel(eWaferLoadPortType PortType);
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void OnStart(eWaferLoadPortType PortType);
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void SendEventToEap(CSecsEventInfo &EventInfo);
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void SecsGetPPFormatValue(PP_FORMAT_HANDLE* pPpFormat);
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void SecsSetPPFormatValue(PP_FORMAT_HANDLE* pPpFormat);
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CString GetCurTerminalMsg(){return m_CurTerminalMsg;};
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void SetCurTerminalMsg(CString s){m_CurTerminalMsg = s;};
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void OnRecvTerminalMsg(CString s){m_CurTerminalMsg = s;};
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void SendTerminalMsg(CString msg);
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CONTROL_STATE GetCurCtrlState(){return m_CurCtrlState;};
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bool IsbSecsInitSucc(){return m_bSecsInitSucc;};
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CString GetCtrlModeStr(CONTROL_MODE CtrlMode);
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void Port1EapCtrlFlow();
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void Port2EapCtrlFlow();
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CString OnEapFoupRfidCommit(int nPort, string pCarrier, CarrierIDStatus::Enum nState);
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CString OnEapMapSlotCommit(int nPort, Carrier pCarrier);
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CString OnEapCreatePJob(ProcessJob &pPJob);
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CString OnEapCreateCJob(ControlJob &pCJob);
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CString OnEapDeletePJob(CString PJobID);
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CString OnEapDeleteCJob(CString JobID);
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CString OnCJobCommand(ControlJobCommand pCJobCmd);
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CString OnCMSCarrierAction(CarrierAction::Enum nAction, int nPort,string pCarrierID);
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void DeleteSecsPJob(CString JobID);
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void DeleteSecsCJob(CString JobID);
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void SetCmsLoadPortUnloaded(int nPort);
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void UpdateEapPJobState(CString JobID,int PJobState);
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void UpdateEapCJobState(CString JobID,int JobState);
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void UpdateEapPWaferState(CString WaferID,int WaferState);
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bool IsbOnlineRemote();
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void ChangeEapFlowStepState(eWaferLoadPortType LoadPortType);
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CString GetTestFoupRfid(eWaferLoadPortType LoadPortType);
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void UpdateEapAccessState(eWaferLoadPortType PortType,bool bAuto);
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CString OnAccessModeChange(int nPort, LoadPortAccessMode::Enum nState);
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void OperatePPFormatData(COperatePPFormatDataPar &OperatePar);
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int GetCurFDCTimes(){return m_CurFDCTimes;};
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void SetbSendAlarmToEap(bool b){m_bSendAlarmToEap = b;};
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bool IsbSendAlarmToEap(){return m_bSendAlarmToEap;};
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CFDCKeepPar &GetFDCKeepPar(){return m_FDCKeepPar;};
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void SecsPPCtrl(PP_HANDLE_DATA* pPpHandle);
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CString GetEquipMDLN();
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private:
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void SemiSecsCommInit();
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void InitSecsVar();
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void SetSecsCommPar();
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void InitCallbackProc();
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CString GetCommStateStr(COMM_STATE State);
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CString GetCtrlStateStr(CONTROL_STATE State);
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REMOTE_REPLY OnRemoteCmd_PPSelect(REMOTE_DATA RemoteData);
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REMOTE_REPLY OnRemoteCmd_Cancel(REMOTE_DATA RemoteData);
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REMOTE_REPLY OnRemoteCmd_CassetteClose(REMOTE_DATA RemoteData);
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REMOTE_REPLY OnRemoteCmd_Start(REMOTE_DATA RemoteData);
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void UpdateEventReportVar(CSecsEventInfo &EventInfo);
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bool EnableGem300();
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void InitCMS();
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void InitPJob();
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void InitCJob();
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void StartEapCtrlFlowThread();
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void PortEapCtrlFlowExt(eWaferLoadPortType PortType);
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void EapFlowStep_Stop(eWaferLoadPortType PortType);
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void EapFlowStep_CheckPortState(eWaferLoadPortType PortType);
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void EapFlowStep_PortLoadReady(eWaferLoadPortType PortType);
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void EapFlowStep_FoupLoading(eWaferLoadPortType PortType);
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void EapFlowStep_FoupLoadEnd(eWaferLoadPortType PortType);
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void EapFlowStep_ReadRfidEnd(eWaferLoadPortType PortType);
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void EapFlowStep_EapFoupIdCommitEnd(eWaferLoadPortType PortType);
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void EapFlowStep_FoupMappingEnd(eWaferLoadPortType PortType);
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void EapFlowStep_EapMapInfoCommitEnd(eWaferLoadPortType PortType);
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void EapFlowStep_EapJobCreatEnd(eWaferLoadPortType PortType);
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void EapFlowStep_EapJobExcuting(eWaferLoadPortType PortType);
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void EapFlowStep_EapJobExcuteEnd(eWaferLoadPortType PortType);
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void EapFlowStep_PortUnloadReady(eWaferLoadPortType PortType);
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void EapFlowStep_PortUnloading(eWaferLoadPortType PortType);
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void EapFlowStep_PortUnloadEnd(eWaferLoadPortType PortType);
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bool CheckPortStateExt(eWaferLoadPortType PortType);
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void OnEapUnloadFoup(int nPort);
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string GetPPFormat_String(list<string> listParament, string pDataFormat);
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void GetEventInfo(eSecsEquipEvent SecsEvent,int &EventId,CString &EventName);
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CString EapCancelCarrier(eWaferLoadPortType LoadPortType,CString FoupID);
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void AnalysisPPParStrVec(vector<string> ListDataVec,vector<CString>&PPParStrVec);
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bool IsSendConditionOk();
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private:
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// SECS
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CSecsEquip300* m_pSecs;//用于secs 通信的对象指针
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CSecsCommPar m_SecsCommPar;//Secs 通信用参数
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COMM_STATE m_CurCommState;//当前的通信状态
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CONTROL_STATE m_CurCtrlState;//当前的控制状态
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int m_DeviceID;//设备识别ID
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vCritical m_lockVarValue;// 变量值
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bool m_bSecsInitSucc;//secs模块初始化是否成功
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bool m_bUseSecsFunc;//是否使用secs 模块(保存值)
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bool m_bCommEnable;//是否允许通信(保存值)
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bool m_bCurCommEnable;//是否允许通信(临时值)
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ESecsProcessState m_CurProcessState;//当前过程状态
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ESecsProcessState m_PreProcessState;//之前的过程状态
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ESecsPortState m_CurPort1State;//当前port1 的状态
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ESecsPortState m_PrePort1State;//之前port1 的状态
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ESecsPortState m_CurPort2State;//当前port2 的状态
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ESecsPortState m_PrePort2State;//之前port2 的状态
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CString m_CurTerminalMsg;//当前的host 远程消息
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Carrier m_pCarrierPort1Map;//Port1的mapping 确认信息
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Carrier m_pCarrierPort2Map;//Port1的mapping 确认信息
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CString m_TestFoupRfid;//测试用FOUP ID
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CString m_TestFoupRfid2;//测试用FOUP ID
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int m_CheckFoupOnDelay;//检查放上foup 的时间s (避免料盒没有放稳)
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int m_FoupRfidEapCommitDelay;//发送EAP foupid 后等待延时ms (保存值)
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int m_CurWaitCommitDelay;//当前等待Commit 的延时ms
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bool m_bUseFixPPListPath;//使用固定recipe 路径
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CPPFormatData m_CurPPFormatData;//当前的PPFormat 数据
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string m_CurPPFormatVal;//用于返回给EAP 的PP code 对应值
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int m_CurFDCTimes;//当前FDC的采集次数,用来观察当前FDC 的采集情况
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bool m_bSendAlarmToEap;//报警通知服务器
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CFDCKeepPar m_FDCKeepPar;//最近一次的保持参数
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bool m_bWriteEquipLog;//是否在D 盘输出日志(保存值)
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CString m_CurSecsLogPath;//当前的secs log目录
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CWafer *m_ReportWafer;//当前事件report 的wafer
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eWaferLoadPortType m_ReportPortType;//当前事件report 的PortType
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};
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extern CSemiSecsCommMgr *gSemiSecsCommMgr;
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extern void SetWindowsTime(SYSTEMTIME time);
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