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#include "StdAfx.h"
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#include "WorkCmdExcuteAction.h"
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#include "GlobalFunction.h"
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#include "ProgramLaserTuiHuo.h"
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#include "CommonFlowMgr.h"
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#include "MotionCtrl.h"
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#include "LaserDevice.h"
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#include "TransferArmMgr.h"
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#include "WarningMgr.h"
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#include "ModuleDeviceMgr.h"
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#include "PlcCommunicationMgr.h"
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#include "DistanceMeterMgr.h"
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#include "LaserBeamMeterMgr.h"
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#include "AnnealMonitoringMgr.h"
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#include "AlignerDyhMgr.h"
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#include "ThorlabsRotatoMotorCtrlMgr.h"
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#include "RecipeMgr.h"
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#include "MotionCtrl.h"
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#include "IO_CtrlMgr.h"
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#include "LaserDevice.h"
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#include "FoupLoadPortMgr.h"
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#include "MachineGateMgr.h"
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#include "DeviceStateMgr.h"
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#include "ExceptionMsg.h"
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#include "DistanceMeterMgr.h"
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#include "EncryptionMgr.h"
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#include "Laser.h"
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#include "CommonFlowMgr.h"
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#include "WorkCmdInvoker.h"
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#include "TekOscilloscopeMgr.h"
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#include "SemiSecsCommMgr.h"
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#include "LaserBeamMeterMgr.h"
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#include "CStringFuc.h"
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#include "ThorlabsKCubeMotorCtrlMgr.h"
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#include "WaferRecipeDataMgr.h"
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CWorkCmdExcuteAction::CWorkCmdExcuteAction()
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{
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m_ExcuteActionPar.m_pBindingPar = NULL;
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}
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CWorkCmdExcuteAction::~CWorkCmdExcuteAction(void)
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{
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}
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void CWorkCmdExcuteAction::WirteLog()
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{
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}
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void CWorkCmdExcuteAction::BindingPar(void *p)
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{
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m_ExcuteActionPar.m_pBindingPar = p;
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};
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void CWorkCmdExcuteAction::SetExcuteActionPar(CExcuteActionPar ActionPar)
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{
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m_ExcuteActionPar = ActionPar;
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SetAfterDelay(ActionPar.m_AfterActionDelay);
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UseSleepDelay();//ʹÓÃsleep ÑÓʱ
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}
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CString CWorkCmdExcuteAction::GetWorkCmdInfoStr()
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{
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CWafer *pWafer = (CWafer *)m_ExcuteActionPar.m_pBindingPar;
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CString InfoStr;
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switch (m_ExcuteActionPar.m_ExcuteAction)
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{
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case _ExcuteAction_WaferTransfer_ResetWaferPosState:
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InfoStr = "Reset Wafer Pos State";
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break;
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case _ExcuteAction_RotatoDimmer_Home:
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InfoStr = "RotatoDimmer_Home";
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break;
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case _ExcuteAction_RotatoDimmer_ToAngle:
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InfoStr = "RotatoDimmer_ToAngle";
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break;
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case _ExcuteAction_TekOscilloscopeInit:
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InfoStr = "TekOscilloscopeInit";
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break;
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default:
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break;
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}
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if(!pWafer)
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return InfoStr;
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switch(m_ExcuteActionPar.m_ExcuteAction)
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{
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case _ExcuteAction_WaferTransfer_CassetteToArm1Pos://´«ËÍwafer ÁϺÐ--->Arm
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InfoStr = gTransferArmMgr->GetTransferExcuteTypeStr(_TransferExcute_CassetteToArm1Pos,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_Arm1PosToAligner://Arm--->×¼Ö±Æ÷
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InfoStr = gTransferArmMgr->GetTransferExcuteTypeStr(_TransferExcute_Arm1PosToAligner,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_AlignerToArm1Pos:
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InfoStr = gTransferArmMgr->GetTransferExcuteTypeStr(_TransferExcute_AlignerToArm1Pos,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_AlignerToArm2Pos://´«ËÍwafer ×¼Ö±Æ÷--->arm LoadλÖÃ
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InfoStr = gTransferArmMgr->GetTransferExcuteTypeStr(_TransferExcute_AlignerToArm2Pos,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_Arm2PosToAligner:
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InfoStr = gTransferArmMgr->GetTransferExcuteTypeStr(_TransferExcute_Arm2PosToAligner,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_Arm2PosToPlatPChuck://arm LoadλÖÃ--->ÔØÅÌ
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InfoStr = gTransferArmMgr->GetTransferExcuteTypeStr(_TransferExcute_Arm2PosToPlatPChuck,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_TriggerAnnealProccess://´¥·¢ÍË»ðÁ÷³Ì
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InfoStr = gTransferArmMgr->GetTransferExcuteTypeStr(_TransferExcute_TriggerAnnealProccess,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_PlatToArm1Pos://ÔØÅÌ--->arm UnloadλÖÃ
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InfoStr = gTransferArmMgr->GetTransferExcuteTypeStr(_TransferExcute_PlatPChuckToArm1Pos,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_PlatToArm2Pos:
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InfoStr = gTransferArmMgr->GetTransferExcuteTypeStr(_TransferExcute_PlatPChuckToArm2Pos,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_Arm1PosToCassette://arm1--->ÁϺÐ
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InfoStr = gTransferArmMgr->GetTransferExcuteTypeStr(_TransferExcute_Arm1PosToCassette,*pWafer);
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break;
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default:
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break;
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}
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return InfoStr;
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}
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//ÔËÐÐʱ°ó¶¨ÏÂÒ»¸öpjobµÄµÚһƬwafer
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void CWorkCmdExcuteAction::BindingNextPjobFirstWafer(void *pWafer)
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{
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if(m_bTransNextJobWaferCmd)//ÐèÒªÊDZêʶµÄcmd
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{
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BindingPar(pWafer);
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}
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}
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//»ñÈ¡Òƶ¯Wafer µÄÖ¸Áî
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ExcuteAction CWorkCmdExcuteAction::GetExcuteActionByMoveWaferPos(EWaferPosType MoveFromPos,EWaferPosType MoveToPos)
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{
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bool bMoveFromPort = (MoveFromPos == _WaferPos_Port1)||(MoveFromPos == _WaferPos_Port2);
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bool bMoveToPort = (MoveToPos == _WaferPos_Port1)||(MoveToPos == _WaferPos_Port2);
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ExcuteAction Action = _ExcuteAction_Null;
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if(bMoveFromPort && MoveToPos == _WaferPos_Arm1)
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Action = _ExcuteAction_WaferTransfer_CassetteToArm1Pos;
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if(MoveFromPos == _WaferPos_Arm1 && MoveToPos == _WaferPos_Aligner)
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Action = _ExcuteAction_WaferTransfer_Arm1PosToAligner;
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if(MoveFromPos == _WaferPos_Aligner && MoveToPos == _WaferPos_Arm1)
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Action = _ExcuteAction_WaferTransfer_AlignerToArm1Pos;
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if(MoveFromPos == _WaferPos_Aligner && MoveToPos == _WaferPos_Arm2)
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Action = _ExcuteAction_WaferTransfer_AlignerToArm2Pos;
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if(MoveFromPos == _WaferPos_Arm2 && MoveToPos == _WaferPos_Aligner)
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Action = _ExcuteAction_WaferTransfer_Arm2PosToAligner;
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if(MoveFromPos == _WaferPos_Arm2 && MoveToPos == _WaferPos_PlatePChuck)
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Action = _ExcuteAction_WaferTransfer_Arm2PosToPlatPChuck;
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if(MoveFromPos == _WaferPos_PlatePChuck && MoveToPos == _WaferPos_Arm1)
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Action = _ExcuteAction_WaferTransfer_PlatToArm1Pos;
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if(MoveFromPos == _WaferPos_PlatePChuck && MoveToPos == _WaferPos_Arm2)
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Action = _ExcuteAction_WaferTransfer_PlatToArm2Pos;
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if(MoveFromPos == _WaferPos_Arm1 && bMoveToPort)
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Action = _ExcuteAction_WaferTransfer_Arm1PosToCassette;
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return Action;
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}
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//Ö¸ÁîÖ´Ðйý³ÌµÄ¼ì²âÏîÄ¿
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void CWorkCmdExcuteAction::ExcuteFlowCheck(vector<eFlowCheckType> FlowCheckVec)
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{
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if(gEncryptionMgr->IsbRunAtNoteBook())
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return;
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int size = FlowCheckVec.size();
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for(int k=0;k<size;k++)
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{
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ExcuteFlowCheckExt(FlowCheckVec[k]);
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}
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}
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void CWorkCmdExcuteAction::ExcuteFlowCheckExt(eFlowCheckType FlowCheckType)
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{
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CString Msg;
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switch(FlowCheckType)
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{
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case _FlowCheck_XYZ_Init:
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if(!gDeviceStateMgr->IsDeviceInitialize())
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Msg = "Device Is Not Initialize";
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break;
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case _FlowCheck_Laser1LDD:
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if(!gLaserDevice->CheckMainLaserLDD(_LaserDeviceType_MainLaser1))
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Msg = "Laser LDD1 Not Open";
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break;
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case _FlowCheck_Laser2LDD:
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if(!gLaserDevice->CheckMainLaserLDD(_LaserDeviceType_MainLaser2))
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Msg = "Laser LDD2 Not Open";
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break;
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case _FlowCheck_LaserMasterMode:
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if(!gLaserDevice->CheckLaserMasterMode())
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Msg = "Laser Master Mode Not Open";
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break;
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case _FlowCheck_PlatWaferOn:
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if(!gTransferArmMgr->CheckPlatWaferVC())
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Msg = "Stage Wafer Vacuum Check Failed";
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break;
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case _FlowCheck_PlatThimbleOff:
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if(!gTransferArmMgr->CheckPlatThimbleState(false))
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Msg = "Stage Thimble Signal Off Check Failed";
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break;
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case _FlowCheck_LoadPosSignal:
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gIO_CtrlMgr->CheckIOItemState(_IO_R_Plat_LoadPosSignal,true);
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break;
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case _FlowCheck_Plat_N2_Alarm:
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//gIO_CtrlMgr->CheckIOItemState(_IO_R_Plat_CDA_Signal,true);
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break;
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case _FlowCheck_XY_LoadPos:
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{
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Dbxy PlatformCoord = gMotionCtrl->GetCurCmdCoordXY();
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ECurPlatXyPos CurPlatXyPos = gPlatSpecialPosMgr->GetCurPlatXyPos(PlatformCoord);
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if((CurPlatXyPos!=_PlatXyPos_ProductUnload))
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Msg = "Stage not at product unload position";
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}
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break;
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case _FlowCheck_RobotAlarm:
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{
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if(gDeviceStateMgr->QueryUsedFunc(_EUsedFunc_WaferTransferArm))
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{
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gTransferArmMgr->CheckRobotState();
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}
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}
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break;
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case _FlowCheck_MotorZ_Coord:
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{
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gMotionCtrl->CheckMotorZCoord();
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}
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break;
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default:
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break;
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}
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if(Msg!="")
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{
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CExceptionMsg ExceptionMsg;
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ExceptionMsg.SetMsg(Msg);
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throw ExceptionMsg;
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}
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}
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bool CWorkCmdExcuteAction::Excute()
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{
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CWafer *pWafer = (CWafer *)m_ExcuteActionPar.m_pBindingPar;//wafer ÊÇ´æÔÚport ÖеÄûÎÊÌâ
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if(m_bTransNextJobWaferCmd && pWafer == NULL)
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return true;
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CPowCheckPt *pCheckPt = NULL;
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bool Ret = true;
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switch(m_ExcuteActionPar.m_ExcuteAction)
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{
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case _ExcuteAction_XyMoveTestSavePt:
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gCommonFlowMgr->XYMoveSaveCoord();
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break;
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case _ExcuteAction_LaserPowSavePt:
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{
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pCheckPt = (CPowCheckPt *)m_ExcuteActionPar.m_pBindingPar;
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gLaserPowCheckMgr->LaserPowSavePt(pCheckPt,m_ExcuteActionPar.m_BoolParVal);
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}
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break;
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case _ExcuteAction_UpdatePowCheckDataList:
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gLaserPowCheckMgr->UpdatePowCheckDataList();
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break;
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case _ExcuteAction_StopMachineGateCtrl:
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gMotionCtrl->StopMachineGateCtrlBuf();
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break;
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case _ExcuteAction_AsixXYMultiPointMove:
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{
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//µ±Ç°µÄwafer sub histroyĿ¼
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CString CurSubRcpDataPath = gAnnealMonitoringMgr->GetCurSubRcpDataPath(*pWafer);
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bool LaserBufCtrl = m_ExcuteActionPar.m_BoolParVal;//ÊÇ·ñ¿ØÖƼ¤¹â
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gAnnealMonitoringMgr->SetbNeedGateCheck(LaserBufCtrl);//¿ØÖƼ¤¹âʱÐèÒª¼ì²é¹âÕ¢
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//ÍË»ðÆô¶¯µÄʱºòÔÙÉèÖõ±Ç°µÄɨÃè¼ä¸ô
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gWaferRecipeDataMgr->SetCurUseScanLineGap(pWafer->m_ScanLineGapY);//ÉèÖÃÓÃÓÚÏÔʾµÄ¼ä¸ô
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int LastScanLineIdx = gMotionCtrl->AsixXYMultiPointMove(LaserBufCtrl,CurSubRcpDataPath);
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if(LastScanLineIdx>0)
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{
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gAnnealMonitoringMgr->CreatPartialJobRecipe(*pWafer,LastScanLineIdx);
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}
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}
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break;
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case _ExcuteAction_ClearWarning://Çå³ý±¨¾¯
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gWarningMgr->ClearAllWarningState();
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break;
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case _ExcuteAction_CheckWarningMsg://¼ì²é±¨¾¯ÐÅÏ¢
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{
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//±¨¾¯µÄʱºòÍ£Ö¹×Ô¶¯×´Ì¬
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if(gWarningMgr->HasWarningMsg(_WarningType_StopJobFlow))
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{
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gCommonFlowMgr->PauseAutomationWorkFlow();
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CString s("±¨¾¯×´Ì¬Î´Çå³ý!");
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CExceptionMsg Msg;
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Msg.SetMsg(s);
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throw Msg;
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}
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}
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break;
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case _ExcuteAction_ModuleInit://һЩģ¿é³õʼ»¯
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gModuleDeviceMgr.OnDeviceInit();
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break;
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case _ExcuteAction_CheckOxygen://¼ì²âÑõÆøŨ¶È
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break;
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case _ExcuteAction_SaveDismeterVal://¼Ç¼²â¾àÒǵĶÁÊý
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gDistanceMeterMgr->SaveCurPlanenessPar(m_ParPt1);
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break;
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case _ExcuteAction_CheckRecipeEdiOnAnnealStart://¼ì²é¼¤¹â¹¦ÂÊÃܶÈÊÇ·ñÂú×ãrecipe µÄÌõ¼þ(ÍË»ð¿ªÊ¼Ç°)
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gAnnealMonitoringMgr->CheckRecipeEdiOnAnnealStart(*pWafer);
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break;
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case _ExcuteAction_StartMonitoringOnAnnealProcess:
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gAnnealMonitoringMgr->StartMonitoringOnAnnealProcess(*pWafer);
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break;
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case _ExcuteAction_StopMonitoringOnAnnealProcess:
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gAnnealMonitoringMgr->StopMonitoringOnAnnealProcess(*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_CassetteToArm1Pos://´«ËÍwafer ÁϺÐ--->Arm
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gTransferArmMgr->TransferExcute(_TransferExcute_CassetteToArm1Pos,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_Arm1PosToAligner://Arm--->×¼Ö±Æ÷
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gTransferArmMgr->SetbLoadOrUnload(m_ExcuteActionPar.m_BoolParVal);//µ±Ç°ÊÇload »¹ÊÇunload
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gTransferArmMgr->TransferExcute(_TransferExcute_Arm1PosToAligner,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_AlignerToArm1Pos:
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gTransferArmMgr->TransferExcute(_TransferExcute_AlignerToArm1Pos,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_AlignerToArm2Pos://´«ËÍwafer ×¼Ö±Æ÷--->arm LoadλÖÃ
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gTransferArmMgr->TransferExcute(_TransferExcute_AlignerToArm2Pos,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_Arm2PosToAligner:
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gTransferArmMgr->TransferExcute(_TransferExcute_Arm2PosToAligner,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_Arm2PosToPlatPChuck://arm LoadλÖÃ--->ÔØÅÌ
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gTransferArmMgr->TransferExcute(_TransferExcute_Arm2PosToPlatPChuck,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_TriggerAnnealProccess://´¥·¢ÍË»ðÁ÷³Ì
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pWafer->m_pTriggerAnnealCmd = this;//´¥·¢wafer annealµÄÖ¸Õë(ÓÃÓÚPAUSEºóSTART)
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gTransferArmMgr->TransferExcute(_TransferExcute_TriggerAnnealProccess,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_WaitAnnealProccess://µÈ´ýÍË»ðÁ÷³Ì½áÊø
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gTransferArmMgr->TransferExcute(_TransferExcute_WaitAnnealProccess,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_PlatToArm1Pos://ÔØÅÌ--->arm UnloadλÖÃ
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gTransferArmMgr->TransferExcute(_TransferExcute_PlatPChuckToArm1Pos,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_PlatToArm2Pos:
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gTransferArmMgr->TransferExcute(_TransferExcute_PlatPChuckToArm2Pos,*pWafer);
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break;
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case _ExcuteAction_WaferTransfer_Arm1PosToCassette://arm1--->ÁϺÐ
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gTransferArmMgr->TransferExcute(_TransferExcute_Arm1PosToCassette,*pWafer);
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break;
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|
|
case _ExcuteAction_WaferTransfer_ResetWaferPosState:
|
|
|
gTransferArmMgr->ResetAllWaferPosState();
|
|
|
break;
|
|
|
case _ExcuteAction_WaferTransfer_Robot_ORG:
|
|
|
gTransferArmMgr->RobotOrg();
|
|
|
break;
|
|
|
case _ExcuteAction_WaferTransfer_Robot_SEVON:
|
|
|
gTransferArmMgr->RobotSevon();
|
|
|
break;
|
|
|
case _ExcuteAction_WaferTransfer_Robot_Reset:
|
|
|
gTransferArmMgr->RobotReset();
|
|
|
break;
|
|
|
//×¼Ö±Æ÷Ïà¹ØÖ¸Áî(µ¥²½Ö¸Áî)
|
|
|
case _ExcuteAction_Aligner_SetPar:
|
|
|
gAlignerDyhMgr->SendAlignerCmd(_AlignerDyhCmd_SetPar);
|
|
|
break;
|
|
|
case _ExcuteAction_Aligner_ClearAlarm:
|
|
|
gAlignerDyhMgr->SendAlignerCmd(_AlignerDyhCmd_ClearAlarm);
|
|
|
break;
|
|
|
case _ExcuteAction_Aligner_Org:
|
|
|
gAlignerDyhMgr->SendAlignerCmd(_AlignerDyhCmd_Org);
|
|
|
break;
|
|
|
case _ExcuteAction_Aligner_TakeStation:
|
|
|
gAlignerDyhMgr->SendAlignerCmd(_AlignerDyhCmd_TakeStation);
|
|
|
break;
|
|
|
case _ExcuteAction_Aligner_VCOn:
|
|
|
gAlignerDyhMgr->SendAlignerCmd(_AlignerDyhCmd_VCOn);
|
|
|
break;
|
|
|
case _ExcuteAction_Aligner_VCOff:
|
|
|
gAlignerDyhMgr->SendAlignerCmd(_AlignerDyhCmd_VCOff);
|
|
|
break;
|
|
|
case _ExcuteAction_Aligner_StartAligner:
|
|
|
gAlignerDyhMgr->SendAlignerCmd(_AlignerDyhCmd_StartAligner);
|
|
|
break;
|
|
|
//Ðýת˥¼õÆ÷Ïà¹Ø
|
|
|
case _ExcuteAction_RotatoDimmer_Home:
|
|
|
gThorlabsRotatoMotorCtrlMgr->ExcuteRotatoDimmerCmd((eLaserDeviceType)m_ExcuteActionPar.m_IntParVal,_RotatoDimmerCmd_Home);
|
|
|
break;
|
|
|
case _ExcuteAction_RotatoDimmer_ToAngle:
|
|
|
{
|
|
|
double Ang = m_ExcuteActionPar.m_DoubleParVal;
|
|
|
eLaserDeviceType LaserType = (eLaserDeviceType)m_ExcuteActionPar.m_IntParVal;
|
|
|
gThorlabsRotatoMotorCtrlMgr->SetToAngVal(LaserType,Ang);
|
|
|
gThorlabsRotatoMotorCtrlMgr->ExcuteRotatoDimmerCmd(LaserType,_RotatoDimmerCmd_ToAng);
|
|
|
}
|
|
|
break;
|
|
|
case _ExcuteAction_WritePlcRegisterTest://IO ²âÊÔдÈë¼Ä´æÆ÷
|
|
|
//Ö»ÔÚIO ²âÊÔ½çÃæÖ´ÐÐûÓÐÎÊÌâ
|
|
|
gPlcCommunicationMgr->IOTestWriteRwRegister((CRwRegisterPar*)m_ExcuteActionPar.m_pBindingPar);
|
|
|
break;
|
|
|
case _ExcuteAction_SetAnneaSubRcprMultiMoveData:
|
|
|
gTransferArmMgr->SetCurAnneaSubRcprMultiMoveData(pWafer,m_ExcuteActionPar.m_IntParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_IO_Write:
|
|
|
gIO_CtrlMgr->WriteIOItemState((eIO_RW_Type)m_ExcuteActionPar.m_IntParVal,m_ExcuteActionPar.m_BoolParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_IO_Read:
|
|
|
gIO_CtrlMgr->CheckIOItemState((eIO_RW_Type)m_ExcuteActionPar.m_IntParVal,m_ExcuteActionPar.m_BoolParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_SetMainLaserPar:
|
|
|
{
|
|
|
if (!gLaserDevice->SetParToLaser(&(m_ExcuteActionPar.m_SetMainLaserPar)))
|
|
|
{
|
|
|
CString s("SetParToLaser failed");
|
|
|
CExceptionMsg Msg;
|
|
|
Msg.SetMsg(s);
|
|
|
throw Msg;
|
|
|
}
|
|
|
}
|
|
|
break;
|
|
|
case _ExcuteAction_OpMainLaserLDD:
|
|
|
gLaserDevice->OprateLaserLdd((eLaserDeviceType)m_ExcuteActionPar.m_IntParVal,m_ExcuteActionPar.m_BoolParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_FoupLoadPort_CheckFoupOn:
|
|
|
if(!gEncryptionMgr->IsbRunAtNoteBook())
|
|
|
{
|
|
|
if(!gFoupLoadPortMgr->CheckFoupOn((eWaferLoadPortType)m_ExcuteActionPar.m_IntParVal))
|
|
|
{
|
|
|
CString s("No Foup On Loadport");
|
|
|
CExceptionMsg Msg;
|
|
|
Msg.SetMsg(s);
|
|
|
throw Msg;
|
|
|
}
|
|
|
}
|
|
|
break;
|
|
|
case _ExcuteAction_FoupLoadPort_CheckDoorOpen://¼ì²éÃÅÊÇ·ñΪ´ò¿ª×´Ì¬
|
|
|
if(!gEncryptionMgr->IsbRunAtNoteBook())
|
|
|
{
|
|
|
set<eLoadportCheckType> CheckTypeSet;
|
|
|
CheckTypeSet.insert(_LoadportCheck_DoorOpen);
|
|
|
|
|
|
COperateLoadPortInfo OpInfo;
|
|
|
OpInfo.m_LoadPortType = (eWaferLoadPortType)m_ExcuteActionPar.m_IntParVal;
|
|
|
OpInfo.m_ReadLoadPortType = _ReadLoadPortType_CheckState;
|
|
|
OpInfo.m_CheckTypeSet = CheckTypeSet;
|
|
|
OpInfo.m_bAlarm = false;
|
|
|
bool Ret = gFoupLoadPortMgr->OperateLoadPortState(OpInfo);
|
|
|
}
|
|
|
break;
|
|
|
case _ExcuteAction_FoupLoadPort_ReadFoupId:
|
|
|
if(!gFoupLoadPortMgr->ReadFoupId((eWaferLoadPortType)m_ExcuteActionPar.m_IntParVal))
|
|
|
{
|
|
|
CString s("FoupID ¶ÁÈ¡´íÎó");
|
|
|
CExceptionMsg Msg;
|
|
|
Msg.SetMsg(s);
|
|
|
throw Msg;
|
|
|
}
|
|
|
break;
|
|
|
case _ExcuteAction_FoupLoadPort_LoadMap:
|
|
|
#if 1
|
|
|
gFoupLoadPortMgr->FoupLoadAndMap((eWaferLoadPortType)m_ExcuteActionPar.m_IntParVal);
|
|
|
#else
|
|
|
gTransferArmMgr->RobotJel_CassetteMapping((eWaferLoadPortType)m_ExcuteActionPar.m_IntParVal);
|
|
|
#endif
|
|
|
break;
|
|
|
case _ExcuteAction_FoupLoadPort_Unload:
|
|
|
gFoupLoadPortMgr->FoupUnload((eWaferLoadPortType)m_ExcuteActionPar.m_IntParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_FoupLoadPort_WriteE84IO:
|
|
|
gFoupLoadPortMgr->WriteE84IO((eWaferLoadPortType)m_ExcuteActionPar.m_IntParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_MachineGateOrg:
|
|
|
gMachineGateMgr->FindOrg();
|
|
|
break;
|
|
|
case _ExcuteAction_MachineGateCheck:
|
|
|
|
|
|
break;
|
|
|
case _ExcuteAction_FlowCheck:
|
|
|
ExcuteFlowCheck(m_ExcuteActionPar.m_FlowCheckVec);
|
|
|
break;
|
|
|
case _ExcuteAction_DisMeterFindFocus:
|
|
|
gDistanceMeterMgr->AutoFindFocus();
|
|
|
break;
|
|
|
case _ExcuteAction_WaitPlatThimbleState:
|
|
|
gTransferArmMgr->WaitPlatThimbleState(m_ExcuteActionPar.m_BoolParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_UpdateWaferAnnealState:
|
|
|
gTransferArmMgr->UpdateWaferAnnealState(*pWafer);
|
|
|
break;
|
|
|
case _ExcuteAction_CheckManualOnPlatWafer:
|
|
|
gTransferArmMgr->CheckManualOnPlatWafer();
|
|
|
break;
|
|
|
case _ExcuteAction_WaferMonitoringStart:
|
|
|
gAnnealMonitoringMgr->WaferMonitoringStart(*pWafer);
|
|
|
break;
|
|
|
case _ExcuteAction_WaferMonitoringEnd:
|
|
|
gAnnealMonitoringMgr->WaferMonitoringEnd(*pWafer);
|
|
|
break;
|
|
|
case _ExcuteAction_SetAnnealPercent:
|
|
|
gProgramLaserTuiHuo->SetCurAnnealPercent(m_ExcuteActionPar.m_DoubleParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_TekOscilloscopeInit:
|
|
|
gTekOscilloscopeMgr->InitDeviceComm(true);
|
|
|
break;
|
|
|
case _ExcuteAction_IO_AirDimmerCtrl:
|
|
|
gIO_CtrlMgr->AirDimmerCtrl(m_ExcuteActionPar.m_BoolParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_SendSecsEvent:
|
|
|
{
|
|
|
gSemiSecsCommMgr->SendEventToEap(m_EventInfo);
|
|
|
|
|
|
//ÉèÖÃPJobÖжÔÓ¦µÄwafer ״̬
|
|
|
CWafer &Wafer = *(m_EventInfo.m_Wafer);
|
|
|
COperateJobPar OperateJobPar;
|
|
|
OperateJobPar.m_PWafer.m_LoadPortType = Wafer.m_LoadPortType;
|
|
|
OperateJobPar.m_PWafer.m_SlotId = Wafer.m_PortSlotId;
|
|
|
OperateJobPar.m_PWaferID = Wafer.m_WaferID;
|
|
|
OperateJobPar.m_OpJobType = _OpJobType_SetPWaferState;//ÐÞ¸ÄWaferµÄ״̬
|
|
|
if(m_EventInfo.m_EventType==_SecsEvent_Wafer_Anneal_Start)
|
|
|
{
|
|
|
OperateJobPar.m_PWafer.m_PWaferState = _PWaferState_IN_PROCESS;//FDC Êý¾Ý¿ªÊ¼
|
|
|
gJobQueueMgr->OperateJob(OperateJobPar);
|
|
|
}
|
|
|
if(m_EventInfo.m_EventType==_SecsEvent_Wafer_Anneal_End)
|
|
|
{
|
|
|
OperateJobPar.m_PWafer.m_PWaferState = _PWaferState_PROCESSED;//FDC Êý¾Ý½áÊø
|
|
|
gJobQueueMgr->OperateJob(OperateJobPar);
|
|
|
}
|
|
|
}
|
|
|
break;
|
|
|
case _ExcuteAction_BeamGageOpen:
|
|
|
gLaserBeamMeterMgr->BeamGageOpen();
|
|
|
break;
|
|
|
case _ExcuteAction_BeamGageClose:
|
|
|
gLaserBeamMeterMgr->BeamGageClose();
|
|
|
break;
|
|
|
case _ExcuteAction_CollectBeamData:
|
|
|
{
|
|
|
CString BeamDataName;
|
|
|
gLaserBeamMeterMgr->BeamGageCollectData(pWafer);
|
|
|
}
|
|
|
break;
|
|
|
case _ExcuteAction_CollectOscillData:
|
|
|
gTekOscilloscopeMgr->ChangeCurOperateType(_TekOscillOperateType_HardCopyBmp);
|
|
|
break;
|
|
|
case _ExcuteAction_ThorlabsKCubeIMotorJog:
|
|
|
gThorlabsKCubeIMotorCtrlMgr->JogMove();
|
|
|
break;
|
|
|
case _ExcuteAction_ConfirmBeforeProcess:
|
|
|
gAnnealMonitoringMgr->ConfirmBeforeProcess(*pWafer);
|
|
|
break;
|
|
|
case _ExcuteAction_EdiCheckStart://edi ¸´¼ì¿ªÊ¼
|
|
|
gAnnealMonitoringMgr->EdiCheckStartAction(m_ExcuteActionPar.m_BoolParVal,m_ExcuteActionPar.m_BoolParVal2);
|
|
|
break;
|
|
|
case _ExcuteAction_EdiCheckEnd://edi ¸´¼ì½áÊø
|
|
|
gAnnealMonitoringMgr->EdiCheckEndAction();
|
|
|
break;
|
|
|
case _ExcuteAction_CheckNextPjobFirstWafer:
|
|
|
gJobQueueMgr->CheckNextPjobFirstWafer();
|
|
|
break;
|
|
|
case _ExcuteAction_SetPjobCompleteState:
|
|
|
gJobQueueMgr->SetPjobCompleteState(m_ExcuteActionPar.m_IntParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_AdjustOsiiMaxAmplitude:
|
|
|
gTekOscilloscopeMgr->ChangeCurOperateType(_TekOscillOperateType_AdjustMaxAmplitude);
|
|
|
break;
|
|
|
case _ExcuteAction_AdjustOsiiMaxAmplitudeCheckExcEnd:
|
|
|
{
|
|
|
bool bWait = m_ExcuteActionPar.m_BoolParVal;
|
|
|
if (bWait)
|
|
|
{
|
|
|
gAnnealMonitoringMgr->WaitTekOscExecEnd(_TekOscillOperateType_AdjustMaxAmplitude
|
|
|
, m_ExcuteActionPar.m_BoolParVal, m_ExcuteActionPar.m_IntParVal);
|
|
|
}
|
|
|
}
|
|
|
break;
|
|
|
case _ExcuteAction_AdjustOsiiMaxAmplitudeBeforeProcess:
|
|
|
gTekOscilloscopeMgr->ChangeCurOperateType(_TekOscillOperateType_AdjustMaxAmplitudeBeforeProcess);
|
|
|
break;
|
|
|
#if 0
|
|
|
case _ExcuteAction_AdjustOsiiMaxAmplitudeBeforeProcessCheckExecEnd://ƬÓëƬ֮¼ä×ÔÊÊÓ¦±ØÐëµÈ´ý½áÊø
|
|
|
gAnnealMonitoringMgr->WaitTekOscExecEnd(_TekOscillOperateType_AdjustMaxAmplitudeBeforeProcess
|
|
|
, m_ExcuteActionPar.m_BoolParVal, m_ExcuteActionPar.m_IntParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_OsiiRawDataCollect:
|
|
|
{
|
|
|
CString DataPath;
|
|
|
if (nullptr == pWafer)
|
|
|
{
|
|
|
DataPath = gProgramLaserTuiHuo->GetLaipuLaserDataDir() + gTekOscilloscopeMgr->GetTestRawDataPath();
|
|
|
}
|
|
|
else
|
|
|
{
|
|
|
DataPath = gAnnealMonitoringMgr->GetCurSubRcpDataPath(*pWafer);
|
|
|
}
|
|
|
gTekOscilloscopeMgr->SetRawDataPath(DataPath);
|
|
|
gTekOscilloscopeMgr->ChangeCurOperateType(_TekOscillOperateType_OscRawDataCollect
|
|
|
, m_ExcuteActionPar.m_DoubleParVal);
|
|
|
}
|
|
|
break;
|
|
|
case _ExcuteAction_OsiiRawDataCollectCheckExcEnd:
|
|
|
gAnnealMonitoringMgr->WaitTekOscExecEnd(_TekOscillOperateType_OscRawDataCollect
|
|
|
, m_ExcuteActionPar.m_BoolParVal, m_ExcuteActionPar.m_IntParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_AdjustOsiiMaxAmplitudeSyncSave2Csv:
|
|
|
{
|
|
|
CString DataPath;
|
|
|
if (nullptr == pWafer)
|
|
|
{
|
|
|
DataPath = gProgramLaserTuiHuo->GetLaipuLaserDataDir() + gTekOscilloscopeMgr->GetTestRawDataPath();
|
|
|
}
|
|
|
else
|
|
|
{
|
|
|
DataPath = gAnnealMonitoringMgr->GetCurSubRcpDataPath(*pWafer);
|
|
|
}
|
|
|
gTekOscilloscopeMgr->SetRawDataPath(DataPath);
|
|
|
gTekOscilloscopeMgr->ChangeCurOperateTypeSyncSave2Csv(
|
|
|
_TekOscillOperateType_AdjustMaxAmplitudeSyncSave2Csv
|
|
|
, m_ExcuteActionPar.m_StringParVal, m_ExcuteActionPar.m_IntParVal);
|
|
|
}
|
|
|
break;
|
|
|
case _ExcuteAction_AdjustOsiiMaxAmplitudeSyncSave2CsvCheckExcEnd:
|
|
|
gAnnealMonitoringMgr->WaitTekOscExecEnd(_TekOscillOperateType_AdjustMaxAmplitudeSyncSave2Csv
|
|
|
, m_ExcuteActionPar.m_BoolParVal);
|
|
|
break;
|
|
|
#endif
|
|
|
case _ExcuteAction_IncCycRunTime:
|
|
|
gTransferArmMgr->SetCyclicRunTime(m_ExcuteActionPar.m_IntParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_MotionParameterCompare:
|
|
|
gMotionCtrl->MotionParameterCompare();
|
|
|
break;
|
|
|
case _ExcuteAction_SetN2Val:
|
|
|
gAnnealMonitoringMgr->SetN2Val(m_ExcuteActionPar.m_DoubleParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_MFCUseSignal:
|
|
|
gAnnealMonitoringMgr->SetUseMFCWork(m_ExcuteActionPar.m_BoolParVal);
|
|
|
break;
|
|
|
case _ExcuteAction_CheckLaserPathPow:
|
|
|
{
|
|
|
gAnnealMonitoringMgr->AnalyseProcessPathPowState(true);
|
|
|
}
|
|
|
break;
|
|
|
case _ExcuteAction_FoupUnLoadCheckArm1Pos:
|
|
|
gTransferArmMgr->UnLoadCheckArm1Pos();
|
|
|
break;
|
|
|
default:
|
|
|
break;
|
|
|
}
|
|
|
return Ret;
|
|
|
}
|
|
|
|
|
|
|
