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C

#ifndef LOGIC_IO_DEFINE_214_H
#define LOGIC_IO_DEFINE_214_H
/*!
IO
*/
#pragma region INPUT
#define IN_CASSEXISTCHECK12Inch_Left 0 //!料盒传感器,左
#define IN_CASSEXISTCHECK12Inch_Right 1 //!料盒传感器,右
#define IN_CASSEXISTCHECK8Inch_Left 46 //!8寸料盒传感器,左
#define IN_CASSEXISTCHECK8Inch_Right 63 //!8寸料盒传感器,右
#define IN_SCAN_RIGHT 2 //!扫描传感器右
#define IN_SCAN_LEFT 3 //!扫描传感器左
#define IN_CHECKBOX_HAS_WAFER_LEFT 5 //!CheckBox有无晶圆检测左检测有无晶圆传感器12Inch
#define IN_CHECKBOX_HAS_WAFER_RIGHT 4 //!CheckBox有无晶圆检测检测有无晶圆传感器8Inch
#define IN_CHECKBOX_DOOR_OPENED 6 //!CheckBox盒 门打开状态打开时为TRUE
#define IN_WaferOutCass_Front_Cassete 7 //!料框外靠轨道有晶元检测
#define IN_WaferOutCass_Wafer_OutSide 8 //!料框晶元出位检测
#define IN_CLAW_Opend 10 //!夹爪伸出传感器,即张开、释放Release
#define IN_CLAW_Closed 9 //!夹爪缩回传感器,即闭合
#define IN_CLAW_ANTICOLLISION 11 //!夹爪防撞,有信号时正常,没有信号时撞到了或传感器异常
#define IN_CHECK_EXIST_CLAW 12 //!夹爪上检测铁环有无的传感器
//#define IN_CHECK_EXIST_BELOW_RAIL 13 //!轨道下方检测晶圆有无的传感器
#define IN_Rail_NearCass_HasWafer 14 //!近轨道检测传感器1,靠料盒
#define IN_Rail_NearLoc_HasWafer 15 //!近轨道检测传感器2,远离料盒
#define IN_Rail_FarCass_HasWafer 16 //!远轨道检测传感器1,靠料盒
#define IN_Rail_FarLoc_HasWafer 17 //!远轨道检测传感器2,远离料盒
//气压相关
#define IN_MAIN_PRESSURE 18 //!总输入气压
#define IN_WT_WAFER_VACUUM 19 //!平台陶瓷盘真空压力传感器
#define IN_LOAD_VACUUM 20 //!上料真空压力传感器
#define IN_UNLOAD_VACUUM 21 //!下料真空压力传感器
#define IN_CLEAN_VACUUM 22 //!清洗真空状态
#define IN_COAT_VACUUM 23 //!涂敷真空状态
#define IN_WT_RING_VACUUM 24 //!刚环真空压力传感器
#define IN_TRANS_VACUUM 25 //!中转真空压力传感器
#define IN_CLEAN_CURTAIN_CLOSED 26 //!清洗保护罩关闭
#define IN_CLEAN_CURTAIN_OPENED 27 //!清洗保护罩打开
#define IN_COAT_CURTAIN_CLOSED 28 //!涂覆保护罩关闭
#define IN_COAT_CURTAIN_OPENED 29 //!涂覆保护罩打开
#define IN_COAT_ARM_UP_FORWARD 30 //!涂覆摆臂升起传感器
#define IN_COAT_ARM_DOWN_BACK 31 //!涂覆摆臂缩回传感器
#define IN_SAFETY_SENSOR_LOAD 33 //!安全限位保护
#define IN_SAFETY_SENSOR_UNLOAD 32 //!安全限位保护
#define IN_SAFETY_SENSOR_CLAW 34 //!安全限位保护
#define IN_WATER_PRESSURE 35 //!水压传感器
#define IN_WATER_FLOW 36 //!水流量传感器
#define IN_LIQUID_ALM_CLEAN 37 //!清洗区漏液
#define IN_LIQUID_ALM_COOLING 38 //!水冷机漏液
#define IN_LIQUID_ALARM_LASER 39 //!激光漏液传感器
#define IN_LIQUID_ALARM_COAT 40 //!涂覆区漏液
#define IN_SAFEDOOR_LEFT 41 //!安全门左,切割
#define IN_SAFEDOOR_RIGHT 42 //!安全门右,清洗涂覆
#define IN_SAFEDOOR_Cassete 43 //!安全门上料区
//#define IN_SAFEDOOR_Cassete 46 //!检查料料盒8Inch
#define IN_WT_Worktable_Install_Check 50 //!陶瓷盘底坐安装真空检测
#define IN_Z_SAFE_CHECK 51 //!Z轴安全检测
#define IN_LASER_Shutter_All_Down 53 //!总光闸缩回传感器
#define IN_LASER_Shutter_All_Up 54 //!总光闸伸出传感器
#define IN_LASER_Shutter_Wide_Down 55 //!Wide光闸缩回传感器
#define IN_LASER_Shutter_Wide_Up 56 //!Wide光闸伸出传感器
#define IN_LASER_Shutter_Narrow_Down 57 //!Narrow光闸缩回传感器
#define IN_LASER_Shutter_Narrow_Up 58 //!Narrow光闸伸出传感器
#define IN_CLAW_Collision_Detection_Push 61 //!防撞伸出,如果没信号说明撞到吧
#define IN_CLAW_Collision_Detection_Pull 62 //!防止拉不动
//unused
//#define IN_CLEAN_SPINDLE_UP_FORWARD 34 //!清洗主轴伸出传感器
//#define IN_CLEAN_SPINDLE_DOWN_BACK 35 //!清洗主轴缩回传感器
//
//#define IN_COAT_SPINDLE_UP_FORWARD 41 //!涂覆主轴伸出传感器
//#define IN_COAT_SPINDLE_DOWN_BACK 42 //!涂覆主轴缩回传感器
#pragma endregion INPUT
#pragma region OUTPUT
#define OUT_LOAD_VACUUM 0 //!上料吸真空电磁阀
#define OUT_LOAD_VACUUM_BREAK 1 //!上料破真空电磁阀
#define OUT_UNLOAD_VACUUM 2 //!下料吸真空电磁阀
#define OUT_UNLOAD_VACUUM_BREAK 3 //!下料破真空电磁阀
#define OUT_WT_WAFER_VACUUM 4 //!加工台吸真空电磁阀
#define OUT_WT_WAFER_VACUUM_BREAK 5 //!加工台破真空电磁阀
#define OUT_CLEAN_VACUUM 6 //!清洗主轴吸真空电磁阀
#define OUT_CLEAN_VACUUM_BREAK 7 //!清洗破真空
#define OUT_COAT_VACUUM 8 //!涂覆主轴吸真空电磁阀
#define OUT_COAT_VACUUM_BREAK 9 //!涂覆主轴破真空电磁阀
#define OUT_WT_RING_VACUUM 10 //!刚环吸真空电磁阀
#define OUT_WT_RING_VACUUM_BREAK 11 //!刚环破真空电磁阀
#define OUT_TRANSFER_VACUUM 12 //!中转吸真空电磁阀
#define OUT_TRANSFER_VACUUM_BREAK 13 //!中转破真空电磁阀
#define OUT_CLAW_CLOSED 14 //!夹抓电磁阀,给信号即闭合,夹取物料
#define OUT_CLEAN_CURTAIN_OPENED 15 //!清洗保护罩关闭
#define OUT_CLEAN_AIR 16 //清洗吹气阀(清洗摆臂)
#define OUT_CLEAN_TWOFLUID_WATER 17 //清洗二体水阀(清洗摆臂)
#define OUT_CLEAN_TWOFLUID_AIR 18 //清洗二流体气阀(清洗摆臂)
#define OUT_CLEAN_ELECT_AIR 19 //!摆臂上的静电气阀(清洗摆臂)
#define OUT_COAT_CURTAIN_OPENED 20 //!涂覆保护罩关闭
#define OUT_COAT_ARM_UP 21 //!涂敷摆臂升降控制阀(涂覆摆臂)
#define OUT_COAT_TWOFLUID_WATER 22 //!涂覆区二流体水(清洗摆臂)
#define OUT_COAT_TWOFLUID_AIR 23 //!涂覆区二流体气(清洗摆臂)
#define OUT_COAT_ELECT_AIR 24 //!静电清除气阀(清洗摆臂)
#define OUT_COAT_WASHRING_WATER 25 //!洗铁环水阀(清洗摆臂)
#define OUT_COAT_CLEANING_GLUE_WATER 26 //!涂覆区清洗胶水池的水
#define OUT_Shutter_All_Open 28 //!总光闸
#define OUT_Shutter_Wide_Open 29 //!Wide光闸
#define OUT_Shutter_Narrow_Open 30 //!Narrow总光闸
#define OUT_LASERGATE 53 //!没有信号时出光 NOTOE:为0时出光 1时不出光
#define OUT_LENS_Blow_Inner 31 //!切割内吹气
#define OUT_LENS_Blow_Outter 32 //!切割外吹气
#define OUT_CCD_AIR 33 //!CCD吹气
#define OUT_CCD_AIR_6X 52 //!6X CCD吹气
#define OUT_LEFTDOOR_UNLOCK 34 //!左门(加工区)解锁为1时解锁
#define OUT_RIGHTDOOR_UNLOCK 35 //!右门(清洗涂覆)解锁为1时解锁
#define OUT_POWER_ELECT_ENTRY 36 //入口静电消除器供电
#define OUT_ELECT_Entry 37 //!入口静电阀
#define OUT_RED 38 //!报警灯
#define OUT_YELLOW 39 //!黄
#define OUT_BLUE 40 //!蓝,白
#define OUT_GREEN 41 //!绿
#define OUT_BUZZ 42 //!蜂鸣
#define OUT_POWER_ELECT_WT 43 //!平台静电供电
#define OUT_ELECT_Wt 44 //!平台区静电阀
#define OUT_LIGHT 45 //!日光灯
#define OUT_POWER_ELECT_Other 46 //!其他静电阀供电
#define OUT_ELECT_Clean 47 //!清洗区静电阀
#define OUT_ELECT_Coat 48 //!涂覆区静电阀
#define OUT_ELECT_Transfer 49 //!传片静电阀
#define OUT_ELECT_Load 50 //!上料静电阀
#define OUT_ELECT_Unload 51 //!下料静电阀
#define OUT_WT_BASE_VACUUM 54 //!陶瓷盘底座真空
//UNUSED
//#define OUT_COAT_SPINDLE_UPDOWN 24 //主轴,升降控制阀
//#define OUT_CLEAN_SPINDLE_UPDOWN 31 //清洗主轴阀
//清洗副臂
//#define OUT_CLEAN_TWOFLUID_WATER2 21 //清洗2二体水阀
//#define OUT_CLEAN_TWOFLUID_AIR2 22 //清洗2二流体气阀
#define OUT_POWER_WATER_COOLING 43 //水冷机冷却
#pragma endregion OUTPUT
#endif //LOGIC_IO_DEFINE_214_H