|
|
#ifndef LOGIC_IO_DEFINE_LOWK_H
|
|
|
#define LOGIC_IO_DEFINE_LOWK_H
|
|
|
|
|
|
/*!
|
|
|
IO配置
|
|
|
*/
|
|
|
#pragma region INPUT
|
|
|
#define IN_CASSEXISTCHECK12Inch_Left 0 //!料盒传感器,左
|
|
|
#define IN_CASSEXISTCHECK12Inch_Right 1 //!料盒传感器,右
|
|
|
#define IN_CASSEXISTCHECK8Inch_Left 2 //!8寸料盒传感器,左
|
|
|
#define IN_CASSEXISTCHECK8Inch_Right 3 //!8寸料盒传感器,右
|
|
|
|
|
|
#define IN_SCAN_LEFT 4 //!扫描传感器左
|
|
|
#define IN_SCAN_RIGHT 5 //!扫描传感器右
|
|
|
|
|
|
#define IN_CHECKBOX_HAS_WAFER_LEFT 6 //!CheckBox有无晶圆检测左，检测有无晶圆传感器12Inch
|
|
|
#define IN_CHECKBOX_HAS_WAFER_RIGHT 7 //!CheckBox有无晶圆检测，检测有无晶圆传感器8Inch
|
|
|
#define IN_CHECKBOX_DOOR_OPENED 8 //!CheckBox盒 门打开状态，打开时为TRUE
|
|
|
|
|
|
#define IN_WaferOutCass_Wafer_OutSide 9 //!料框晶元出位检测，下
|
|
|
#define IN_WaferOutCass_Front_Cassete 10 //!料框外靠轨道有晶元检测,上
|
|
|
|
|
|
#define IN_CLAW_Opend 11 //!夹爪伸出传感器,即张开、释放Release
|
|
|
#define IN_CLAW_Closed 12 //!夹爪缩回传感器，即闭合
|
|
|
#define IN_CLAW_ANTICOLLISION 13 //!夹爪防撞，有信号时正常，没有信号时撞到了或传感器异常
|
|
|
|
|
|
#define IN_CHECK_EXIST_CLAW 14 //!夹爪上检测铁环有无的传感器
|
|
|
|
|
|
#define IN_Rail_NearCass_HasWafer 15 //!近轨道检测传感器1,靠料盒
|
|
|
#define IN_Rail_NearLoc_HasWafer 16 //!近轨道检测传感器2,远离料盒
|
|
|
|
|
|
#define IN_Rail_FarCass_HasWafer 17 //!远轨道检测传感器1,靠料盒
|
|
|
|
|
|
//气压相关
|
|
|
#define IN_MAIN_PRESSURE 18 //!总输入气压
|
|
|
#define IN_WT_WAFER_VACUUM 19 //!平台陶瓷盘真空压力传感器
|
|
|
|
|
|
#define IN_LOAD_VACUUM 20 //!上料真空压力传感器
|
|
|
#define IN_UNLOAD_VACUUM 21 //!下料真空压力传感器
|
|
|
|
|
|
#define IN_CLEAN_VACUUM 22 //!清洗真空状态
|
|
|
#define IN_COAT_VACUUM 23 //!涂敷真空状态
|
|
|
|
|
|
#define IN_WT_RING_VACUUM 24 //!刚环真空压力传感器
|
|
|
#define IN_TRANS_VACUUM 25 //!中转真空压力传感器
|
|
|
|
|
|
#define IN_CLEAN_CURTAIN_CLOSED 26 //!清洗保护罩关闭
|
|
|
#define IN_CLEAN_CURTAIN_OPENED 27 //!清洗保护罩打开
|
|
|
|
|
|
#define IN_COAT_CURTAIN_CLOSED 28 //!涂覆保护罩关闭
|
|
|
#define IN_COAT_CURTAIN_OPENED 29 //!涂覆保护罩打开
|
|
|
|
|
|
#define IN_COAT_ARM_UP_FORWARD 30 //!涂覆摆臂升起传感器
|
|
|
#define IN_COAT_ARM_DOWN_BACK 31 //!涂覆摆臂缩回传感器
|
|
|
|
|
|
#define IN_LASER_Shutter_All_Down 32 //!总光闸缩回传感器
|
|
|
#define IN_LASER_Shutter_All_Up 33 //!总光闸伸出传感器
|
|
|
#define IN_LASER_Shutter_Wide_Down 34 //!Wide光闸缩回传感器
|
|
|
#define IN_LASER_Shutter_Wide_Up 35 //!Wide光闸伸出传感器
|
|
|
#define IN_LASER_Shutter_Narrow_Down 36 //!Narrow光闸缩回传感器
|
|
|
#define IN_LASER_Shutter_Narrow_Up 37 //!Narrow光闸伸出传感器
|
|
|
|
|
|
#define IN_CLAW_Collision_Detection_Push 38 //!防撞伸出，如果没信号说明撞到吧
|
|
|
#define IN_CLAW_Collision_Detection_Pull 39 //!防止拉不动,缩回
|
|
|
#define IN_WT_Worktable_Install_Check 40 //!陶瓷盘底坐安装真空检测，Base检查
|
|
|
|
|
|
#define IN_SAFEDOOR_Cassete 41 //!安全门上料区,前门
|
|
|
#define IN_SAFEDOOR_LEFT 42 //!安全门左,切割
|
|
|
#define IN_SAFEDOOR_RIGHT 43 //!安全门右,切割
|
|
|
#define IN_SAFEDOOR_Clean_Left 44 //清洗只有一个门，使用的同一个
|
|
|
#define IN_SAFEDOOR_Clean_Right 45
|
|
|
#define IN_SAFEDOOR_Coat_Left 46 //!安全门上料区
|
|
|
#define IN_SAFEDOOR_Coat_Right 47 //!安全门上料区
|
|
|
|
|
|
#define IN_WATER_PRESSURE 48 //!水压传感器
|
|
|
#define IN_WATER_FLOW 49 //!水流量传感器
|
|
|
|
|
|
#define IN_LIQUID_ALM_CLEAN 50 //!清洗区漏液
|
|
|
#define IN_LIQUID_ALM_COOLING 51 //!水冷机漏液
|
|
|
#define IN_LIQUID_ALARM_LASER 52 //!激光漏液传感器
|
|
|
#define IN_LIQUID_ALARM_COAT 53 //!涂覆区漏液
|
|
|
|
|
|
#define IN_WT_KERF_VACCUM 59 //!Kerf真空状态
|
|
|
#define IN_WT_KERF_VACCUM_BREAK 60 //!Kerf破真空
|
|
|
|
|
|
//#define IN_Z_SAFE_CHECK 51 //!Z轴安全检测
|
|
|
|
|
|
//#define IN_SAFETY_SENSOR_LOAD 33 //!安全限位保护
|
|
|
//#define IN_SAFETY_SENSOR_UNLOAD 32 //!安全限位保护
|
|
|
//#define IN_SAFETY_SENSOR_CLAW 34 //!安全限位保护
|
|
|
|
|
|
//unused
|
|
|
//#define IN_CLEAN_SPINDLE_UP_FORWARD 34 //!清洗主轴伸出传感器
|
|
|
//#define IN_CLEAN_SPINDLE_DOWN_BACK 35 //!清洗主轴缩回传感器
|
|
|
//
|
|
|
//#define IN_COAT_SPINDLE_UP_FORWARD 41 //!涂覆主轴伸出传感器
|
|
|
//#define IN_COAT_SPINDLE_DOWN_BACK 42 //!涂覆主轴缩回传感器
|
|
|
|
|
|
#pragma endregion INPUT
|
|
|
|
|
|
#pragma region OUTPUT
|
|
|
#define OUT_LOAD_VACUUM 0 //!上料吸真空电磁阀
|
|
|
#define OUT_LOAD_VACUUM_BREAK 1 //!上料破真空电磁阀
|
|
|
#define OUT_UNLOAD_VACUUM 2 //!下料吸真空电磁阀
|
|
|
#define OUT_UNLOAD_VACUUM_BREAK 3 //!下料破真空电磁阀
|
|
|
|
|
|
#define OUT_WT_WAFER_VACUUM 4 //!加工台吸真空电磁阀
|
|
|
#define OUT_WT_WAFER_VACUUM_BREAK 5 //!加工台破真空电磁阀
|
|
|
|
|
|
#define OUT_CLEAN_VACUUM 6 //!清洗主轴吸真空电磁阀
|
|
|
#define OUT_CLEAN_VACUUM_BREAK 7 //!清洗破真空
|
|
|
|
|
|
#define OUT_COAT_VACUUM 8 //!涂覆主轴吸真空电磁阀
|
|
|
#define OUT_COAT_VACUUM_BREAK 9 //!涂覆主轴破真空电磁阀
|
|
|
|
|
|
#define OUT_WT_RING_VACUUM 10 //!刚环吸真空电磁阀
|
|
|
#define OUT_WT_RING_VACUUM_BREAK 11 //!刚环破真空电磁阀
|
|
|
|
|
|
#define OUT_TRANSFER_VACUUM 12 //!中转吸真空电磁阀
|
|
|
#define OUT_TRANSFER_VACUUM_BREAK 13 //!中转破真空电磁阀
|
|
|
|
|
|
#define OUT_TRANSFER_VACCUM_BREAK_FORCE 14
|
|
|
#define OUT_LOAD_VACCUM_BREAK_FORCE 15
|
|
|
#define OUT_UNLOAD_VACCUM_BREAK_FORCE 16
|
|
|
|
|
|
#define OUT_CLAW_CLOSED 17 //!夹抓电磁阀,给信号即闭合，夹取物料
|
|
|
#define OUT_CLAW_PUSHOUT 18 //!防撞气缸伸出
|
|
|
|
|
|
#define OUT_CLEAN_CURTAIN_OPENED 19 //!清洗保护罩关闭
|
|
|
#define OUT_CLEAN_AIR 20 //清洗吹气阀(清洗摆臂)
|
|
|
#define OUT_CLEAN_TWOFLUID_WATER 21 //清洗二体水阀(清洗摆臂)
|
|
|
#define OUT_CLEAN_TWOFLUID_AIR 22 //清洗二流体气阀(清洗摆臂)
|
|
|
#define OUT_CLEAN_ELECT_AIR 23 //!摆臂上的静电气阀(清洗摆臂)
|
|
|
#define OUT_CLEAN_CURTAIN_AIR 24 //!清洗保护罩气阀
|
|
|
|
|
|
#define OUT_COAT_CURTAIN_OPENED 25 //!涂覆保护罩关闭
|
|
|
#define OUT_COAT_ARM_UP 26 //!涂敷摆臂升降控制阀(涂覆摆臂)
|
|
|
#define OUT_COAT_TWOFLUID_WATER 27 //!涂覆区二流体水(清洗摆臂)
|
|
|
#define OUT_COAT_TWOFLUID_AIR 28 //!涂覆区二流体气(清洗摆臂)
|
|
|
#define OUT_COAT_ELECT_AIR 29 //!静电清除气阀(清洗摆臂)
|
|
|
#define OUT_COAT_WASHRING_WATER 30 //!洗铁环水阀(清洗摆臂)
|
|
|
|
|
|
#define OUT_COAT_CLEANING_GLUE_WATER 31 //!涂覆区清洗胶水池的水
|
|
|
#define OUT_COAT_CURTAIN_AIR 32 //!涂覆保护罩气阀
|
|
|
|
|
|
#define OUT_Shutter_All_Open 33 //!总光闸
|
|
|
#define OUT_Shutter_Wide_Open 34 //!Wide光闸
|
|
|
#define OUT_Shutter_Narrow_Open 35 //!Narrow总光闸
|
|
|
#define OUT_LASERGATE 36 //!没有信号时出光 NOTOE:为0时出光 1时不出光
|
|
|
|
|
|
#define OUT_LENS_Blow_Inner 37 //!切割内吹气
|
|
|
#define OUT_LENS_Blow_Outter 38 //!切割外吹气
|
|
|
#define OUT_CCD_AIR 39 //!2X CCD吹气
|
|
|
#define OUT_CCD_AIR_6X 40 //!6X CCD吹气
|
|
|
|
|
|
#define OUT_LEFTDOOR_UNLOCK 41 //!左门(加工区)解锁，为1时解锁
|
|
|
#define OUT_RIGHTDOOR_UNLOCK 42 //!右门(清洗涂覆)解锁，为1时解锁
|
|
|
|
|
|
|
|
|
#define OUT_POWER_ELECT_ENTRY 43 //入口静电消除器供电
|
|
|
#define OUT_ELECT_Entry 44 //!入口静电阀
|
|
|
#define OUT_POWER_ELECT_WT 45 //!平台静电供电
|
|
|
#define OUT_ELECT_Wt 46 //!平台区静电阀
|
|
|
|
|
|
#define OUT_POWER_ELECT_Other 47 //!其他静电阀供电
|
|
|
#define OUT_ELECT_Clean 48 //!清洗区静电阀
|
|
|
#define OUT_ELECT_Coat 49 //!涂覆区静电阀
|
|
|
#define OUT_ELECT_Transfer 50 //!传片静电阀
|
|
|
#define OUT_ELECT_Load 51 //!上料静电阀
|
|
|
#define OUT_ELECT_Unload 52 //!下料静电阀
|
|
|
|
|
|
#define OUT_RED 53 //!报警灯
|
|
|
#define OUT_YELLOW 54 //!黄
|
|
|
#define OUT_BLUE 55 //!蓝,白
|
|
|
#define OUT_GREEN 56 //!绿
|
|
|
#define OUT_BUZZ 57 //!蜂鸣
|
|
|
#define OUT_LIGHT 58 //!日光灯
|
|
|
|
|
|
#define OUT_WT_BASE_VACUUM 59 //!陶瓷盘底座真空
|
|
|
#define OUT_WT_BASE_VACUUM_Break 60 //!陶瓷盘底座真空
|
|
|
|
|
|
#define OUT_WT_KERF_VACCUM 61
|
|
|
#define OUT_WT_KERF_VACCUM_BREAK 62
|
|
|
|
|
|
|
|
|
#define IN_Rail_FarLoc_HasWafer IN_Rail_FarCass_HasWafer //!远轨道检测传感器2,远离料盒(正常应该不使用了)
|
|
|
//UNUSED
|
|
|
//#define OUT_COAT_SPINDLE_UPDOWN 24 //主轴，升降控制阀
|
|
|
//#define OUT_CLEAN_SPINDLE_UPDOWN 31 //清洗主轴阀
|
|
|
|
|
|
//清洗副臂
|
|
|
//#define OUT_CLEAN_TWOFLUID_WATER2 21 //清洗2二体水阀
|
|
|
//#define OUT_CLEAN_TWOFLUID_AIR2 22 //清洗2二流体气阀
|
|
|
|
|
|
//#define OUT_POWER_WATER_COOLING 43 //水冷机冷却
|
|
|
|
|
|
#define IN_ANALOG_BEAM_LENS_AIR 0 //!吹气保护流量
|
|
|
|
|
|
#pragma endregion OUTPUT
|
|
|
#endif //LOGIC_IO_DEFINE_LOWK_H
|
